利用导纳光谱法进行深能级谱分析

March 16 Pub Date : 1988-03-16 DOI:10.1002/PSSA.2211060119

I. Marchishin, V. N. Ovsyuk, S. B. Sevastianov

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引用次数: 2

摘要

提出了用导纳光谱(AS)研究杂质分布不均匀的表面势垒结构中的深层能级的理论。描述了一种处理实验数据以确定能级的能量位置、俘获截面以及浓度分布的方法。讨论了各种因素对原子吸收光谱分辨率的影响。[忽略俄语文本]。

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Deep Level Profiling Using an Admittance Spectroscopy Method

A theory for the admittance spectroscopy (AS) to study deep levels in surface-barrier structures with nonuniform distribution of impurities is developed. A procedure of treating experimental data to determine energy positions of levels, their capture cross-sections, as well as the Concentration profiles is described. The effect of various factors on AS resolution is discussed. [Russian Text Ignored].

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March 16

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