具有可调调谐特性的广泛可调谐微机械光学滤波器

LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242) Pub Date : 2001-11-12 DOI:10.1109/LEOS.2001.969293

C. Lin, Junxiang Fu, J. Harris

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引用次数: 0

摘要

我们设计了一种新的可调谐滤波器，其顶部DBR结构为Al/sub 2/O/sub 3//GaAs，并演示了使用该设计的可调谐滤波器。通过去除多余的氮化物，实现了可调节的调谐特性，在释放过程中提供了更高的产量，并且能够在释放过程中实现灵活的结构。机械测量和光学测量均表明实现了窄线宽、宽调谐范围的滤光片。

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Widely tunable micromachined optical filter with adjustable tuning characteristics

We designed a new tunable filter with a top DBR structure of Al/sub 2/O/sub 3//GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter.

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LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)

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