倒装过程中磕碰变形失效的分析与解决

N. Wang, Xiaoqing Li, Liqun Gu, Ying Li, Jianwei Zhou, Jonghyun Chae
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引用次数: 1

摘要

本文通过实验与仿真相结合的方法,对FC(倒装芯片)工艺中存储产品磕碰变形失效的根本原因及解决方法进行了研究。经过分析,提出MUF(充型下模)不平衡流动是造成此类失效的真正根本原因。为了验证这一点,提出了模拟的方法来解释碰撞在模具过程中所受的应力水平。此外,发现所有类型的凹凸变形产品都比没有凹凸变形的产品具有更大的模具尺寸。为此,提出了用不同尺寸的模具来模拟MUF流动的仿真方法。为解决凸模变形问题,对模具工艺进行了优化。通过DOE找到了影响碰撞变形的关键参数。然后对轮廓进行了优化,结果表明该轮廓在很大程度上避免了凹凸变形破坏。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analysis and solution of bump deformation failure in Flip chip process
In this paper, the root cause and solution of bump deformation failure of memory product in FC(Flip chip) process were studied through experimental and simulation method. After analysis, MUF (Mold under fill) unbalanced flow was proposed to be the real root cause for this type of failure. In order to verificate it, the simulation method was proposed to explain what level of stress did the bump suffer during the mold process. What' more, It was found that all the kinds of products with bump deformation have a larger size of die than those products without bump deformation. So the simulation method was proposed to simulate the MUF flow by different size of die. In order to solve the bump deformation problem, the mold process was optimized. The key parameter which effects the bump deformation was found by DOE. Then the profile was optimized and the result showed that it avoided the bump deformation failure a lot.
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