硅辐射探测器技术:从平面到三维

2015 IEEE Hot Chips 27 Symposium (HCS) Pub Date : 2023-04-13 DOI:10.3390/chips2020006

G. Dalla Betta, Jixing Ye

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引用次数: 3

摘要

硅辐射探测器是一种特殊类型的微电子传感器，在许多应用中起着至关重要的作用。在阐述了探测器的基本概念和主要要求之后，讨论了探测器技术的发展，这主要是由于对前沿科学实验的需求不断增加。

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Silicon Radiation Detector Technologies: From Planar to 3D

Silicon radiation detectors, a special type of microelectronic sensor which plays a crucial role in many applications, are reviewed in this paper, focusing on fabrication aspects. After addressing the basic concepts and the main requirements, the evolution of detector technologies is discussed, which has been mainly driven by the ever-increasing demands for frontier scientific experiments.

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2015 IEEE Hot Chips 27 Symposium (HCS)

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