{"title":"基于MEMS器件的能量清除方法研究","authors":"G. De Pasquale, A. Somà","doi":"10.1109/SMICND.2008.4703357","DOIUrl":null,"url":null,"abstract":"This work is focused on the design approach to MEMS devices for the energy scavenge; two conversion strategies from vibrations to voltage are considered: electrostatic capacitive and piezoelectric. Main analytical relations for capacitive structures are derived and used for a quantitative estimation of the power scavenged with respect to the operation frequency and to eventual applications.","PeriodicalId":6406,"journal":{"name":"2008 IEEE International Conference on Semiconductor Electronics","volume":"24 1","pages":"163-166"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Investigations on energy scavenging methods using MEMS devices\",\"authors\":\"G. De Pasquale, A. Somà\",\"doi\":\"10.1109/SMICND.2008.4703357\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work is focused on the design approach to MEMS devices for the energy scavenge; two conversion strategies from vibrations to voltage are considered: electrostatic capacitive and piezoelectric. Main analytical relations for capacitive structures are derived and used for a quantitative estimation of the power scavenged with respect to the operation frequency and to eventual applications.\",\"PeriodicalId\":6406,\"journal\":{\"name\":\"2008 IEEE International Conference on Semiconductor Electronics\",\"volume\":\"24 1\",\"pages\":\"163-166\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE International Conference on Semiconductor Electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2008.4703357\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE International Conference on Semiconductor Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2008.4703357","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigations on energy scavenging methods using MEMS devices
This work is focused on the design approach to MEMS devices for the energy scavenge; two conversion strategies from vibrations to voltage are considered: electrostatic capacitive and piezoelectric. Main analytical relations for capacitive structures are derived and used for a quantitative estimation of the power scavenged with respect to the operation frequency and to eventual applications.
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