物理和化学气相沉积法获得的氧化钛薄膜在光学无标签生物传感应用中的生物功能化有效性

M. Dominik , E. Roźniecka , Ł. Wachnicki , J. Niedziółka-Jönsson , M. Godlewski , W.J. Bock , M. Śmietana
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引用次数: 4

摘要

研究了化学(原子层沉积,ALD)和物理(反应磁控溅射,RMS)气相沉积两种氧化钛(TiOx)沉积方法对光学性能和表面化学修饰的影响。该tiox薄膜作为一种功能涂层,用于增强两种类型的无标记光学传感器的传感性能,即基于金纳米粒子的局部表面等离子体共振(LSPR)传感器和分别工作在可见光和红外光谱范围内的光纤长周期光栅(LPGs)。我们发现,独立于沉积方法,膜增加了LPG的灵敏度和增强生物功能化能力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Biofunctionalization Effectiveness of Titanium Oxide Thin Films Obtained with Physical and Chemical Vapour Deposition Methods for Optical Label-free Biosensing Applications

An influence of titanium oxide (TiOx) deposition method, i.e., chemical (atomic layer deposition, ALD) and physical (reactive magnetron sputtering, RMS) vapor deposition, on the optical properties and surface chemical modification were investigated. TheTiOx film was used as a functional coating for enhancing sensing properties of two types of label-free optical sensors, i.e., localized surface plasmon resonance (LSPR) sensors based on gold nanoparticles and induced in optical fibre long-period gratings (LPGs) working in visible and infrared spectral range, respectively. We have found that independently on deposition method the films increase the sensitivity of LPG and enhance biofunctionalization capabilities.

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