{"title":"GaN/AlGaN/SiC高电子迁移率晶体管的电流坍缩缩放","authors":"D.S. Rawal, Amit, Sunil Sharma, Sonalee Kapoor, Robert Laishram, Seema Vinayak","doi":"10.1016/j.ssel.2019.04.002","DOIUrl":null,"url":null,"abstract":"<div><p>This study reports the scaling of current collapse in GaN/AlGaN HEMTs with respect to the un-passivated gate drain distance on the gate edge. The source drain current reduction increased from 4 mA to 28 mA, when un-passivated gap increased from 200 nm to 600 nm respectively mainly due to virtual gate formation at gate edge as a result of applied large reverse bias between the gate/drain electrodes. The length of virtual gate is a function of un-passivated gap that modifies the lateral electric field between gate-drain region and results in variable current reduction due to variation in available traps with gap. The simulated E-field distribution is found to vary strongly with the un-passivated gap up to 200 nm and weakly thereafter. The HEMT knee voltage shifted from 0.5 V to 1.2 V when gap is increased from 200 nm to 600 nm respectively due to electric field distribution modification and hence electron trapping in the un-passivated gap resulting in increased device on-resistance (R<sub>on</sub>). The current collapse finally resulted in reduction of device saturated RF power to 1.2 W/mm at 2.2 GHz for HEMT with an un-passivated gap of 600 nm.</p></div>","PeriodicalId":101175,"journal":{"name":"Solid State Electronics Letters","volume":"1 1","pages":"Pages 30-37"},"PeriodicalIF":0.0000,"publicationDate":"2019-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.ssel.2019.04.002","citationCount":"7","resultStr":"{\"title\":\"Current collapse scaling in GaN/AlGaN/SiC high electron mobility transistors\",\"authors\":\"D.S. Rawal, Amit, Sunil Sharma, Sonalee Kapoor, Robert Laishram, Seema Vinayak\",\"doi\":\"10.1016/j.ssel.2019.04.002\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>This study reports the scaling of current collapse in GaN/AlGaN HEMTs with respect to the un-passivated gate drain distance on the gate edge. The source drain current reduction increased from 4 mA to 28 mA, when un-passivated gap increased from 200 nm to 600 nm respectively mainly due to virtual gate formation at gate edge as a result of applied large reverse bias between the gate/drain electrodes. The length of virtual gate is a function of un-passivated gap that modifies the lateral electric field between gate-drain region and results in variable current reduction due to variation in available traps with gap. The simulated E-field distribution is found to vary strongly with the un-passivated gap up to 200 nm and weakly thereafter. The HEMT knee voltage shifted from 0.5 V to 1.2 V when gap is increased from 200 nm to 600 nm respectively due to electric field distribution modification and hence electron trapping in the un-passivated gap resulting in increased device on-resistance (R<sub>on</sub>). The current collapse finally resulted in reduction of device saturated RF power to 1.2 W/mm at 2.2 GHz for HEMT with an un-passivated gap of 600 nm.</p></div>\",\"PeriodicalId\":101175,\"journal\":{\"name\":\"Solid State Electronics Letters\",\"volume\":\"1 1\",\"pages\":\"Pages 30-37\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/j.ssel.2019.04.002\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solid State Electronics Letters\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2589208819300043\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solid State Electronics Letters","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2589208819300043","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Current collapse scaling in GaN/AlGaN/SiC high electron mobility transistors
This study reports the scaling of current collapse in GaN/AlGaN HEMTs with respect to the un-passivated gate drain distance on the gate edge. The source drain current reduction increased from 4 mA to 28 mA, when un-passivated gap increased from 200 nm to 600 nm respectively mainly due to virtual gate formation at gate edge as a result of applied large reverse bias between the gate/drain electrodes. The length of virtual gate is a function of un-passivated gap that modifies the lateral electric field between gate-drain region and results in variable current reduction due to variation in available traps with gap. The simulated E-field distribution is found to vary strongly with the un-passivated gap up to 200 nm and weakly thereafter. The HEMT knee voltage shifted from 0.5 V to 1.2 V when gap is increased from 200 nm to 600 nm respectively due to electric field distribution modification and hence electron trapping in the un-passivated gap resulting in increased device on-resistance (Ron). The current collapse finally resulted in reduction of device saturated RF power to 1.2 W/mm at 2.2 GHz for HEMT with an un-passivated gap of 600 nm.