GaN/AlGaN/SiC高电子迁移率晶体管的电流坍缩缩放

D.S. Rawal, Amit, Sunil Sharma, Sonalee Kapoor, Robert Laishram, Seema Vinayak
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引用次数: 7

摘要

本研究报告了GaN/AlGaN hemt中电流崩溃与栅极边缘未钝化栅极漏极距离的比例关系。当未钝化间隙分别从200 nm增加到600 nm时,源极漏极电流减小量从4 mA增加到28 mA,这主要是由于栅极/漏极之间施加了较大的反向偏压,在栅极边缘形成了虚拟栅极。虚拟栅极的长度是一个未钝化间隙的函数,它改变了栅极-漏极区域之间的侧向电场,并由于可用陷阱的变化而导致可变电流减小。模拟的电场分布在200 nm以内随未钝化间隙变化较大,此后变化较小。当间隙从200 nm增加到600 nm时,由于电场分布的改变和未钝化间隙中的电子捕获导致器件导通电阻增加,HEMT膝盖电压分别从0.5 V移动到1.2 V (Ron)。电流崩溃最终导致器件饱和RF功率降低到1.2 W/mm,在2.2 GHz下,HEMT的未钝化间隙为600 nm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Current collapse scaling in GaN/AlGaN/SiC high electron mobility transistors

This study reports the scaling of current collapse in GaN/AlGaN HEMTs with respect to the un-passivated gate drain distance on the gate edge. The source drain current reduction increased from 4 mA to 28 mA, when un-passivated gap increased from 200 nm to 600 nm respectively mainly due to virtual gate formation at gate edge as a result of applied large reverse bias between the gate/drain electrodes. The length of virtual gate is a function of un-passivated gap that modifies the lateral electric field between gate-drain region and results in variable current reduction due to variation in available traps with gap. The simulated E-field distribution is found to vary strongly with the un-passivated gap up to 200 nm and weakly thereafter. The HEMT knee voltage shifted from 0.5 V to 1.2 V when gap is increased from 200 nm to 600 nm respectively due to electric field distribution modification and hence electron trapping in the un-passivated gap resulting in increased device on-resistance (Ron). The current collapse finally resulted in reduction of device saturated RF power to 1.2 W/mm at 2.2 GHz for HEMT with an un-passivated gap of 600 nm.

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