Large Stroke Tracking of a Nanomanipulator with Anticipatory Anti-windup Compensation of Time-varying Internal Principle-based Control

This paper proposes an anticipatory anti-windup time-varying internal principle-based control design for an XY compliant nanomanipulator to achieve large stroke trajectory tracking. The design of the anticipatory anti-windup compensator is decoupled with the time-varying internal principle-based structure to facilitate the integrated controller design. The proposed control algorithm is experimentally validated, where the tracking error of the reference generated by time-varying exosystem is 73.03nm (RMS) and enhanced tracking performance with saturation is demonstrated by a significant error reduction compared with the conventional anti-windup compensation.