基于薄膜体声谐振器的质量传感器

2009 2nd International Conference on Biomedical Engineering and Informatics Pub Date : 2009-10-30 DOI:10.1109/BMEI.2009.5305157

Biyan Wu

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引用次数: 0

摘要

提出了一种基于薄膜体声谐振器(FBAR)的质量传感器。该传感器采用标准MEMS工艺制作成背蚀刻结构，用安捷伦矢量网络分析仪测量谐振器曲线。结果表明，该传感器的Q因子在610以上，谐振频率约为1608MHz。该FBAR传感器应用于湿度传感器。对该传感器的s11和Q因子的再现性进行了评价。

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Mass Sensor Based on Thin Film Bulk Acoustic Resonator

A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.

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2009 2nd International Conference on Biomedical Engineering and Informatics

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