磁控管辅助PVD工艺制备多功能薄膜的研究

The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science Pub Date : 2021-09-15 DOI:10.35219/mms.2021.3.04

S. Boiciuc

{"title":"磁控管辅助PVD工艺制备多功能薄膜的研究","authors":"S. Boiciuc","doi":"10.35219/mms.2021.3.04","DOIUrl":null,"url":null,"abstract":"The paper aims to obtain thin films of nickel and zinc through the magnetron-assisted spraying process and their characterization from a structural point of view, of electrical, optical properties and corrosion resistance. It was found that as the intensity and discharge power increase, changes occur in the structure and properties of the deposited films. \n","PeriodicalId":22358,"journal":{"name":"The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science","volume":"21 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Studies and Research on Obtaining Multifunctional Thin Films by Magnetron-Assisted PVD Process\",\"authors\":\"S. Boiciuc\",\"doi\":\"10.35219/mms.2021.3.04\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper aims to obtain thin films of nickel and zinc through the magnetron-assisted spraying process and their characterization from a structural point of view, of electrical, optical properties and corrosion resistance. It was found that as the intensity and discharge power increase, changes occur in the structure and properties of the deposited films. \\n\",\"PeriodicalId\":22358,\"journal\":{\"name\":\"The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science\",\"volume\":\"21 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.35219/mms.2021.3.04\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.35219/mms.2021.3.04","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文旨在通过磁控管辅助喷涂工艺获得镍和锌薄膜，并从结构、电学、光学性能和耐腐蚀性的角度对其进行表征。结果表明，随着放电强度和放电功率的增加，沉积膜的结构和性能发生了变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Studies and Research on Obtaining Multifunctional Thin Films by Magnetron-Assisted PVD Process

The paper aims to obtain thin films of nickel and zinc through the magnetron-assisted spraying process and their characterization from a structural point of view, of electrical, optical properties and corrosion resistance. It was found that as the intensity and discharge power increase, changes occur in the structure and properties of the deposited films.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science

自引率

0.00%

发文量

审稿时长

8 weeks