真空蒸发碲化镉薄膜的结构和表面研究

H. S. Patel, J. Rathod, K. D. Patel, V. Pathak
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引用次数: 5

摘要

碲化镉(CdTe)是最成熟的II-VI化合物之一,主要是由于它作为光子材料的用途。现有的应用,以及正在考虑的应用,越来越要求严格控制材料的性能。高质量薄膜的沉积对此类应用至关重要。这种趋势也表现在结构和表面形貌上,结构完美度越高,表面越光滑。本文主要研究了碲化镉薄膜的结构和表面表征。采用室温热蒸发法制备了厚度约4000A的CdTe薄膜。采用XRD (x射线衍射技术)和TEM(透射电子显微镜)对膜进行了结构表征。发现CdTe薄膜呈六边形结构。同时,从XRD数据中获得了晶格参数、晶粒尺寸(D)、位错密度(ρ)和微应变(e)。通过对CdTe薄膜的TEM分析,证实了其多晶性。用扫描电镜技术对其表面形貌进行了研究。原子力显微镜(AFM)提供数字化位置表面高度的数值数据,可用于各种表面表征。本文对研究结果进行了分析,得出了一些结论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Structural and Surface Studies of Vacuum Evaporated Cadmium Telluride Thin Films
Cadmium Telluride (CdTe) is one of the most well established II–VI compounds largely due to its use as a photonic material. Existing applications, as well as those under consideration, are increasingly demanding stringent control of the material properties. The deposition of high quality thin films is of the utmost importance to such applications. This tendency has also manifested itself in the structural and surface morphology with higher structural perfection yielding smoother surfaces. The present investigations are about the structural and surface characterization of CdTe thin films. Thin films of CdTe with thickness around 4000A have been deposited by the thermal evaporation method at room temperature. The structural characterization of this film was carried out using XRD (X-ray diffraction technique) and TEM (Transmission electron microscopy). The structure of CdTe film was found to be hexagonal. Also, the lattice parameters, grain size (D), dislocation density (ρ) and micro strain (e), were taken from the XRD data. From TEM of CdTe thin films, the polycrystalline nature was confirmed. A surface morphology study was done by SEM (Scanning electron microscopy) technique. Atomic Force Microscopy (AFM) provides numerical data of surface height at digitized locations, which are usable for various surface characterizations. In this paper, the results have been analyzed to draw some conclusions which are also presented here.
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