Radiation tolerance of nanostructured TiZrSiN coatings

Nanostructured TiZrSiN coatings were formed on various types of substrates in regimes with a lack and stoichiometric nitrogen concentration using reactive magnetron sputtering. Using the methods of scanning electron microscopy and X-ray diffraction, the structural-phase state of the initial coatings, their thickness, and morphology were investigated. Nanoindentation tests according to the methods of Oliver and Farr, as well as tribomechanical tests were performed to determine hardness, Young's modulus and friction coefficient of the TiZrSiN coatings. The TiZrSiN coatings were irradiated with hydrogen ions H + with an energy of 500 keV in the fluence range from 1 • 10 16 to 1 • 10 17 ions/cm 2 on the AN 2500 accelerator complex. It was found that TiZrSiN nanostructured coatings deposited in nitrogen deficiency and stoichiometry regimes are radiation-resistant and potentially promising for use as protective on the bodies of small aircraft in orbit of the Earth and in open space.