脉冲激光沉积制备氮化镓/氮化铝纳米薄膜的场发射特性

Wei Zhao, Ruzhi Wang, FengYing Wang, Siying Chen, Bo Wang, Hao Wang, Hui Yan
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引用次数: 0

摘要

采用脉冲激光沉积(PLD)技术在Si衬底上合成了不同厚度的GaN/AlN两层薄膜。还合成了氮化镓和氮化铝单层膜进行比较。结果表明,GaN/AlN双层膜的导通场比单层膜的导通场减小了2个数量级。量子结构效应为电子发射提供了有利的位置,提高了隧穿能力。我们发现,通过调整GaN/AlN的厚度,可以获得由量子势阱/势垒结构调制引起的各种FE特性。结果表明,氮化镓/氮化铝两层纳米膜存在一个最佳厚度以获得最佳场发射性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field emission from GaN/AlN nano-films on Si substrate prepared by pulsed laser deposition
GaN/AlN two-layer films with different thickness are synthesized on Si substrates by pulsed laser deposition (PLD). GaN and AlN single-layer films are also synthesized for comparison. It is found that the turn-on field of the GaN/AlN two-layer films are considerably decreased 2 orders of magnitude than that of single-layer films. The improvement of FE characteristics an attributed to the quantum structure effects, which supplies a favorable location of electron emission and enhances tunneling ability. We show that by tuning the thickness of GaN/AlN, various FE characteristics can be obtained, which is induced by the modulation of quantum potential well/barrier structure. It indicates that an optimal thickness exists for GaN/AlN two-layer nano-films to give best field emission performance.
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