Wei Zhao, Ruzhi Wang, FengYing Wang, Siying Chen, Bo Wang, Hao Wang, Hui Yan
{"title":"脉冲激光沉积制备氮化镓/氮化铝纳米薄膜的场发射特性","authors":"Wei Zhao, Ruzhi Wang, FengYing Wang, Siying Chen, Bo Wang, Hao Wang, Hui Yan","doi":"10.1109/INEC.2010.5424581","DOIUrl":null,"url":null,"abstract":"GaN/AlN two-layer films with different thickness are synthesized on Si substrates by pulsed laser deposition (PLD). GaN and AlN single-layer films are also synthesized for comparison. It is found that the turn-on field of the GaN/AlN two-layer films are considerably decreased 2 orders of magnitude than that of single-layer films. The improvement of FE characteristics an attributed to the quantum structure effects, which supplies a favorable location of electron emission and enhances tunneling ability. We show that by tuning the thickness of GaN/AlN, various FE characteristics can be obtained, which is induced by the modulation of quantum potential well/barrier structure. It indicates that an optimal thickness exists for GaN/AlN two-layer nano-films to give best field emission performance.","PeriodicalId":6390,"journal":{"name":"2010 3rd International Nanoelectronics Conference (INEC)","volume":"63 1","pages":"716-717"},"PeriodicalIF":0.0000,"publicationDate":"2010-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Field emission from GaN/AlN nano-films on Si substrate prepared by pulsed laser deposition\",\"authors\":\"Wei Zhao, Ruzhi Wang, FengYing Wang, Siying Chen, Bo Wang, Hao Wang, Hui Yan\",\"doi\":\"10.1109/INEC.2010.5424581\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"GaN/AlN two-layer films with different thickness are synthesized on Si substrates by pulsed laser deposition (PLD). GaN and AlN single-layer films are also synthesized for comparison. It is found that the turn-on field of the GaN/AlN two-layer films are considerably decreased 2 orders of magnitude than that of single-layer films. The improvement of FE characteristics an attributed to the quantum structure effects, which supplies a favorable location of electron emission and enhances tunneling ability. We show that by tuning the thickness of GaN/AlN, various FE characteristics can be obtained, which is induced by the modulation of quantum potential well/barrier structure. It indicates that an optimal thickness exists for GaN/AlN two-layer nano-films to give best field emission performance.\",\"PeriodicalId\":6390,\"journal\":{\"name\":\"2010 3rd International Nanoelectronics Conference (INEC)\",\"volume\":\"63 1\",\"pages\":\"716-717\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-03-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 3rd International Nanoelectronics Conference (INEC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INEC.2010.5424581\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 3rd International Nanoelectronics Conference (INEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INEC.2010.5424581","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Field emission from GaN/AlN nano-films on Si substrate prepared by pulsed laser deposition
GaN/AlN two-layer films with different thickness are synthesized on Si substrates by pulsed laser deposition (PLD). GaN and AlN single-layer films are also synthesized for comparison. It is found that the turn-on field of the GaN/AlN two-layer films are considerably decreased 2 orders of magnitude than that of single-layer films. The improvement of FE characteristics an attributed to the quantum structure effects, which supplies a favorable location of electron emission and enhances tunneling ability. We show that by tuning the thickness of GaN/AlN, various FE characteristics can be obtained, which is induced by the modulation of quantum potential well/barrier structure. It indicates that an optimal thickness exists for GaN/AlN two-layer nano-films to give best field emission performance.