电流对Cu/熔融Sn/Cu互连体系中Cu-Sn金属间化合物晶粒取向的影响

Jiayun Feng, Baolei Liu, Yanhong Tian, B. Zhang
{"title":"电流对Cu/熔融Sn/Cu互连体系中Cu-Sn金属间化合物晶粒取向的影响","authors":"Jiayun Feng, Baolei Liu, Yanhong Tian, B. Zhang","doi":"10.1109/ICEPT.2016.7583151","DOIUrl":null,"url":null,"abstract":"In this paper, the interfacial reaction and the grain orientation of Cu<sub>6</sub>Sn<sub>5</sub> intermetallic compound was investigated in Cu/molten Sn/Cu interconnection system under the current density of 1.0 × 10<sup>2</sup>A/cm<sup>2</sup> at 260 °C. The imposed electric current significantly accelerated the Cu<sub>6</sub>Sn<sub>5</sub> growth rate at anode side under the effect of solid-liquid electromigration, while it has no obvious effect on the Cu<sub>3</sub>Sn growth rate. The growth kinetics calculation results showed that with the passage of electric current, the growth of Cu<sub>6</sub>Sn<sub>5</sub> compound at the cathode was determined by reaction process, while the Cu<sub>3</sub>Sn growth was diffusion-controlled. In addition, the current can strongly influence the orientation of Cu<sub>6</sub>Sn<sub>5</sub> phase in Cu-molten Sn-Cu system. There was a strong texture of [0001] direction in Cu<sub>6</sub>Sn<sub>5</sub> phase, which was paralleled with the direction of electron flow. This result indicated that the electrons traveled along some particular directions and were scattered least by the lattices. The newly formed Cu-Sn compounds orientated themselves in those particular growth directions to facilitate electron flow.","PeriodicalId":6881,"journal":{"name":"2016 17th International Conference on Electronic Packaging Technology (ICEPT)","volume":"89 1","pages":"348-351"},"PeriodicalIF":0.0000,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Influence of electric current on the grain orientation of Cu-Sn intermetallic compounds in Cu/molten Sn/Cu interconnection system\",\"authors\":\"Jiayun Feng, Baolei Liu, Yanhong Tian, B. Zhang\",\"doi\":\"10.1109/ICEPT.2016.7583151\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, the interfacial reaction and the grain orientation of Cu<sub>6</sub>Sn<sub>5</sub> intermetallic compound was investigated in Cu/molten Sn/Cu interconnection system under the current density of 1.0 × 10<sup>2</sup>A/cm<sup>2</sup> at 260 °C. The imposed electric current significantly accelerated the Cu<sub>6</sub>Sn<sub>5</sub> growth rate at anode side under the effect of solid-liquid electromigration, while it has no obvious effect on the Cu<sub>3</sub>Sn growth rate. The growth kinetics calculation results showed that with the passage of electric current, the growth of Cu<sub>6</sub>Sn<sub>5</sub> compound at the cathode was determined by reaction process, while the Cu<sub>3</sub>Sn growth was diffusion-controlled. In addition, the current can strongly influence the orientation of Cu<sub>6</sub>Sn<sub>5</sub> phase in Cu-molten Sn-Cu system. There was a strong texture of [0001] direction in Cu<sub>6</sub>Sn<sub>5</sub> phase, which was paralleled with the direction of electron flow. This result indicated that the electrons traveled along some particular directions and were scattered least by the lattices. The newly formed Cu-Sn compounds orientated themselves in those particular growth directions to facilitate electron flow.\",\"PeriodicalId\":6881,\"journal\":{\"name\":\"2016 17th International Conference on Electronic Packaging Technology (ICEPT)\",\"volume\":\"89 1\",\"pages\":\"348-351\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 17th International Conference on Electronic Packaging Technology (ICEPT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEPT.2016.7583151\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 17th International Conference on Electronic Packaging Technology (ICEPT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEPT.2016.7583151","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

本文在260℃下,在电流密度为1.0 × 102A/cm2的Cu/熔融Sn/Cu互连体系中,研究了Cu6Sn5金属间化合物的界面反应和晶粒取向。外加电流在固液电迁移作用下显著加速了阳极侧Cu6Sn5的生长速率,而对Cu3Sn的生长速率无明显影响。生长动力学计算结果表明,随着电流的通过,Cu6Sn5化合物在阴极处的生长由反应过程决定,而Cu3Sn的生长受扩散控制。此外,电流对cu -熔融Sn-Cu体系中Cu6Sn5相的取向有较大影响。Cu6Sn5相中存在较强的[0001]方向织构,与电子流方向平行。这一结果表明,电子沿某些特定的方向运动,并且被晶格散射最少。新形成的Cu-Sn化合物在这些特定的生长方向上定向,以促进电子流动。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of electric current on the grain orientation of Cu-Sn intermetallic compounds in Cu/molten Sn/Cu interconnection system
In this paper, the interfacial reaction and the grain orientation of Cu6Sn5 intermetallic compound was investigated in Cu/molten Sn/Cu interconnection system under the current density of 1.0 × 102A/cm2 at 260 °C. The imposed electric current significantly accelerated the Cu6Sn5 growth rate at anode side under the effect of solid-liquid electromigration, while it has no obvious effect on the Cu3Sn growth rate. The growth kinetics calculation results showed that with the passage of electric current, the growth of Cu6Sn5 compound at the cathode was determined by reaction process, while the Cu3Sn growth was diffusion-controlled. In addition, the current can strongly influence the orientation of Cu6Sn5 phase in Cu-molten Sn-Cu system. There was a strong texture of [0001] direction in Cu6Sn5 phase, which was paralleled with the direction of electron flow. This result indicated that the electrons traveled along some particular directions and were scattered least by the lattices. The newly formed Cu-Sn compounds orientated themselves in those particular growth directions to facilitate electron flow.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信