Ni纳米阵列与纳米银焊料互连的研究

Zhen-zhu Zheng, Fan Yang, Chunqing Wang
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引用次数: 1

摘要

随着集成电路和半导体产业的飞速发展,传统的微连接技术已经不能满足大功率器件的需求。由于尺寸效应,纳米材料可以提供低温连接和高温使用性能,这可能是大功率应用的一个有前途的途径。在互连过程中,如纳米银焊料,烧结温度远高于理论计算值。这种巨大的温差与纳米结构与传统衬垫之间的微观结构差距有关。为了实现低温连接,提高互连效率,本文采用电化学方法在Cu衬垫表面沉积了Ni纳米结构。镍纳米结构可以减小纳米焊料与传统焊盘之间的尺寸差异。控制镍的表面纳米结构具有重要意义。研究了电流密度、温度等电化学参数。研究了表面纳米结构和纳米焊料烧结工艺。与传统的连接工艺相比,可以在更低的温度下完成连接。整个连接可以更有效地完成。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of interconnection between Ni nano-array and nano-Ag solder
As the integrated circuit and semiconductor industry developing rapidly, traditional micro-joining technology can not meet the new high-power devices challenge. Due to the size effect, nano-materials can offer low-temperature connection and high-temperature service property, which may be a promising approach for the high-power application. In the interconnection process, such as nano-Ag solder, the sintering temperature is much higher than the theoretical calculating value. This huge temperature difference is related to the microstructure gap between the nanostructure and the conventional pad. In order to achieve the low-temperature joining and increase the interconnection efficiency, the Ni nanostructure was deposited on the Cu pad surface by the electrochemical method in this paper. The Ni nanostructure could reduce the size difference between the nano-solder and the traditional pad. It is significant to control the Ni surface nanostructure. The electrochemical parameters, such as current density and temperature were studied. The surface nanostructure and nano-solder sintering process were investigated. The interconnection can be completed in lower temperature compared with the traditional joining process. The whole connection could be finished more efficiently.
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