基于SiN-AlScN的PMUT器件的频率和声学性能可调性

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI:10.1109/IFCS-ISAF41089.2020.9234917

Shomnath-Bhowmick, E. Marigó, M. Soundara-Pandian

{"title":"基于SiN-AlScN的PMUT器件的频率和声学性能可调性","authors":"Shomnath-Bhowmick, E. Marigó, M. Soundara-Pandian","doi":"10.1109/IFCS-ISAF41089.2020.9234917","DOIUrl":null,"url":null,"abstract":"This paper presents a wide frequency range and acoustic performance tunability for a Piezoelectric Micromachined Ultrasonic transducer (PMUT) device. Aluminium Scandium Nitride (AlScN) sandwiched between Aluminium (Al) electrodes is used for the piezoelectric actuation. Thin-film Silicon-Nitride (SiN) acts as an elastic layer to tune the frequency and optimize the acoustic performance of the PMUT devices. The devices are fabricated using a CMOS compatible monolithic technique. We simulated the acoustic performance of the device in a water-coupled medium and demonstrated for a cavity size of $80\\mu\\mathrm{m}$ the frequencies could be tuned within the range of 3.6MHz to 5.4MHz with a transmitting sensitivity ranging from 5.8 kPa/V to 7.8 kPa/V respectively.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"55 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Frequency and Acoustic Performance Tunability for a SiN-AlScN Based PMUT Device\",\"authors\":\"Shomnath-Bhowmick, E. Marigó, M. Soundara-Pandian\",\"doi\":\"10.1109/IFCS-ISAF41089.2020.9234917\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a wide frequency range and acoustic performance tunability for a Piezoelectric Micromachined Ultrasonic transducer (PMUT) device. Aluminium Scandium Nitride (AlScN) sandwiched between Aluminium (Al) electrodes is used for the piezoelectric actuation. Thin-film Silicon-Nitride (SiN) acts as an elastic layer to tune the frequency and optimize the acoustic performance of the PMUT devices. The devices are fabricated using a CMOS compatible monolithic technique. We simulated the acoustic performance of the device in a water-coupled medium and demonstrated for a cavity size of $80\\\\mu\\\\mathrm{m}$ the frequencies could be tuned within the range of 3.6MHz to 5.4MHz with a transmitting sensitivity ranging from 5.8 kPa/V to 7.8 kPa/V respectively.\",\"PeriodicalId\":6872,\"journal\":{\"name\":\"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)\",\"volume\":\"55 1\",\"pages\":\"1-3\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234917\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234917","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

本文介绍了压电微机械超声换能器(PMUT)器件的宽频率范围和声学性能可调性。压电驱动采用夹在铝电极之间的氮化铝钪(AlScN)。薄膜氮化硅(SiN)作为弹性层来调节频率并优化PMUT器件的声学性能。该器件采用CMOS兼容单片技术制造。我们模拟了该器件在水耦合介质中的声学性能，并证明了在腔体尺寸为$80\mu\ maththrm {m}$时，频率可以在3.6MHz至5.4MHz范围内调谐，发射灵敏度分别为5.8 kPa/V至7.8 kPa/V。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Frequency and Acoustic Performance Tunability for a SiN-AlScN Based PMUT Device

This paper presents a wide frequency range and acoustic performance tunability for a Piezoelectric Micromachined Ultrasonic transducer (PMUT) device. Aluminium Scandium Nitride (AlScN) sandwiched between Aluminium (Al) electrodes is used for the piezoelectric actuation. Thin-film Silicon-Nitride (SiN) acts as an elastic layer to tune the frequency and optimize the acoustic performance of the PMUT devices. The devices are fabricated using a CMOS compatible monolithic technique. We simulated the acoustic performance of the device in a water-coupled medium and demonstrated for a cavity size of $80\mu\mathrm{m}$ the frequencies could be tuned within the range of 3.6MHz to 5.4MHz with a transmitting sensitivity ranging from 5.8 kPa/V to 7.8 kPa/V respectively.

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2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)

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