大型0.3 mm间距晶圆级封装板级可靠性性能研究

B. Waidhas, Jan Proschwitz, Christoph Pietryga, Thomas Wagner, B. Keser
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引用次数: 4

摘要

电路板级可靠性研究已在36 mm²圆片级封装(WLP)上进行,球距为0.3 mm。采用三种不同的钎料球合金进行了温度循环、热冲击和机械冲击试验。除了采用菊花链测试车辆来解决焊点可靠性问题外,还将采用WLP封装的28 nm芯片纳入评估范围,以检查芯片后端线(BEOL)中极低K介电(ELK)的应力影响。这些测试包括对印刷电路板(PCB)厚度和使用板级底填料的影响的选定研究。与行业标准SAC405焊锡球相比,采用SAC-Q焊锡球的WLP有了显著改进。在板上温度循环(TCoB)中,带有SAC-Q (SAC405含3% Bi)的WLP在0.8 mm厚的PCB上在-40°C至85°C的温度范围内实现了超过2000次循环而没有失败,其中SAC405球的首次失败超过800次循环。所有使用LF35 (SAC125Ni)钎料合金的WLP在1000次循环前失效。TCoB的失效模式由SAC405和LF35的焊点疲劳转变为SAC-Q的Cu重分布层(RDL)裂纹。使用WLP封装的28 nm功能芯片在SAC-Q合金球的1000次循环后没有显示ELK裂纹或任何其他故障。采用SAC405 WLP的TCoB在进行下填时通过2000次循环而没有失败。在厚度减少0.4 mm的PCB上组装SAC405球的非未填充WLP也显示出首次失败超过1900次的显着改善。含有SAC-Q和SAC405的WLP通过了机械冲击(在10k g时滴24次)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of the Board Level Reliability Performance of a Large 0.3 mm Pitch Wafer Level Package
Board level reliability investigations have been performed on 36 mm² wafer level packages (WLP) with a 0.3 mm ball pitch. Three different solder ball alloys were included in the temperature cycling, thermal shock and mechanical shock test. In addition to daisy chain test vehicles to address the solder joint reliability, 28 nm die packaged with WLP were included in the assessment to check the stress impact on extreme low K dielectric (ELK) in the die back-end-of-line (BEOL). The tests have included selected studies on the influence of printed circuit board (PCB) thickness and usage of a board level underfill. WLP with SAC-Q solder ball show a significant improvement versus the industry standard SAC405 solder balls. In temperature cycling on board (TCoB), WLP's with SAC-Q (SAC405 with 3% Bi) achieve more than 2000 cycles without fail in temperature range from -40°C to 85°C on a 0.8 mm thick PCB, whereby first fails with SAC405 balls were observed above 800 cycles. All WLP's with LF35 (SAC125Ni) solder alloy fail before 1000 cycles. The failure mode in TCoB changes from solder joint fatigue for SAC405 and LF35 to Cu redistribution layer (RDL) cracks for SAC-Q. The 28 nm functional die packaged with WLP show no ELK crack or any other fail after 1000 cycles for SAC-Q alloy balls. The TCoB with SAC405 WLP pass 2000 cycles without fail when an underfill was applied. Non-underfilled WLP with SAC405 balls assembled on a thickness reduced 0.4 mm PCB show also a significant improvement with a first fail above 1900 cycles. WLP with SAC-Q and SAC405 passed mechanical shock (24 drops at 10k g).
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