亚表面杂质缺陷对分束器涂层抗激光损伤性能的影响

IF 5.2 1区 物理与天体物理 Q1 OPTICS
Wenyun Du, Meiping Zhu, Jun Shi, Tianbao Liu, Jian Sun, Kui Yi, J. Shao
{"title":"亚表面杂质缺陷对分束器涂层抗激光损伤性能的影响","authors":"Wenyun Du, Meiping Zhu, Jun Shi, Tianbao Liu, Jian Sun, Kui Yi, J. Shao","doi":"10.1017/hpl.2023.37","DOIUrl":null,"url":null,"abstract":"Abstract The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm2, which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.","PeriodicalId":54285,"journal":{"name":"High Power Laser Science and Engineering","volume":"22 1","pages":""},"PeriodicalIF":5.2000,"publicationDate":"2023-05-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings\",\"authors\":\"Wenyun Du, Meiping Zhu, Jun Shi, Tianbao Liu, Jian Sun, Kui Yi, J. Shao\",\"doi\":\"10.1017/hpl.2023.37\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm2, which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.\",\"PeriodicalId\":54285,\"journal\":{\"name\":\"High Power Laser Science and Engineering\",\"volume\":\"22 1\",\"pages\":\"\"},\"PeriodicalIF\":5.2000,\"publicationDate\":\"2023-05-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"High Power Laser Science and Engineering\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1017/hpl.2023.37\",\"RegionNum\":1,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"High Power Laser Science and Engineering","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1017/hpl.2023.37","RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 1

摘要

摘要平板激光分束器(PLBS)涂层的激光诱导损伤阈值(LIDT)与基体的亚表面吸收缺陷密切相关。本文提出了一种两步沉积温度法来了解衬底亚表面杂质缺陷对PLBS涂层LIDT的影响。首先,在三种不同的温度下对BK7衬底进行热处理。比较了热处理前后基体的表面形貌和亚表面杂质缺陷分布。然后,设计了由HfO2-Al2O3混合物和SiO2层交替组成的PLBS涂层,在1053 nm处,以45°入射角实现约50:50的分束比(透射比,s偏振光),并采用四种不同的沉积工艺制备了该涂层。实验和仿真结果表明,在热处理过程中,基体的亚表面杂质缺陷向表面迁移并在表面积累,成为涂层中的吸收缺陷源或结核缺陷种子,降低了涂层的LIDT。热处理温度越高,杂质缺陷的迁移和积累越明显。较低的沉积温度(涂层可以完全氧化)有助于提高PLBS涂层的LIDT。当沉积温度为140°C时,PLBS涂层的LIDT (s偏振光,波长为1064 nm,脉冲宽度为9 ns,入射角为45°)为26.2 J/cm2,约为200°C沉积PLBS涂层的6.7倍。我们相信,对PLBS涂层激光损伤机理的研究将有助于提高部分或高透过率涂层在激光波长下的LIDT。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings
Abstract The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm2, which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.
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来源期刊
High Power Laser Science and Engineering
High Power Laser Science and Engineering Physics and Astronomy-Nuclear and High Energy Physics
CiteScore
7.10
自引率
4.20%
发文量
401
审稿时长
21 weeks
期刊介绍: High Power Laser Science and Engineering (HPLaser) is an international, peer-reviewed open access journal which focuses on all aspects of high power laser science and engineering. HPLaser publishes research that seeks to uncover the underlying science and engineering in the fields of high energy density physics, high power lasers, advanced laser technology and applications and laser components. Topics covered include laser-plasma interaction, ultra-intense ultra-short pulse laser interaction with matter, attosecond physics, laser design, modelling and optimization, laser amplifiers, nonlinear optics, laser engineering, optical materials, optical devices, fiber lasers, diode-pumped solid state lasers and excimer lasers.
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