基于开源Scilab/Xcos软件的低成本等离子体蚀刻器单极脉冲直流电源拓扑设计

{"title":"基于开源Scilab/Xcos软件的低成本等离子体蚀刻器单极脉冲直流电源拓扑设计","authors":"Samuel Husin Surya Mandala, M. Januar, Bei Liu, Kou-Chen Liu","doi":"10.1016/j.ssel.2020.05.001","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101175,"journal":{"name":"Solid State Electronics Letters","volume":"27 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Designing the Topology of a Unipolar Pulsed-DC Power Supply using the Open-source Scilab/Xcos Software for a Low-cost Plasma Etcher\",\"authors\":\"Samuel Husin Surya Mandala, M. Januar, Bei Liu, Kou-Chen Liu\",\"doi\":\"10.1016/j.ssel.2020.05.001\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":101175,\"journal\":{\"name\":\"Solid State Electronics Letters\",\"volume\":\"27 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solid State Electronics Letters\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/j.ssel.2020.05.001\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solid State Electronics Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.ssel.2020.05.001","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}