用于红外微光谱仪的下一代高度小型化体mems法布里-帕姆罗滤波器

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI:10.1109/TRANSDUCERS.2019.8808566

M. Ebermann, N. Neumann, S. Hoppe, K. Hiller, J. Seiler, C. Helke, M. Meinig, S. Kurth

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引用次数: 0

摘要

本文报道了中红外块状微机械FP滤波器和可调谐探测器模块小型化的研究进展。芯片尺寸从7×7 mm²减小到5×5 mm²，可以集成到to5尺寸的探测器封装中，这仅是以前使用的TO8的四分之一。同时保持了较高的光吞吐量。采用带有两个可移动反射器的MEMS设计，可以降低驱动电压，并提供可忽略不计的加速度灵敏度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Next Generation of Highly Miniaturized Bulk-Mems Fabry-Pérot Filters For Infrared Microspectrometers

This paper reports on the progress in miniaturization of bulk micromachined FP filters and tunable detector modules for the mid infrared. The chip size was reduced from 7×7 mm² to 5×5 mm², enabling integration into TO5-size detector packages, which is about only one quarter of the formerly used TO8. At the same time a high optical throughput is maintained. A MEMS design with two movable reflectors is used, which allows for lower actuation voltages and provides negligible acceleration sensitivity.

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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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