高精度测定铜线因腐蚀引起的电阻变化的方法

Michael Joo Zhong Lim, M. Goroll, Hai Guan Loh, Zhong Chen, C. S. Tan
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引用次数: 2

摘要

在可靠性测试中,集成电路(IC)封装按照JEDEC (Joint electronic Device Engineering Council)标准进行加速应力测试,以预测其在工作条件下的寿命。在湿气作用下对铜线进行加速应力试验,引起腐蚀,导致电阻增大。本文介绍了一种测量跨键合导线小电阻变化的方法。介绍了一种利用陶瓷封装研究键合线电阻的方法。定制的导线键合布局设计使用裸铜线直接键合在镀金引线框架上。采用四线测量装置来消除不必要的测试引线电阻。进行了两种类型的实验来模拟不同程度的腐蚀,即无偏高加速温度和湿度应力测试(uHAST)和暴露于盐-酸溶液。物理表征,如扫描电子显微镜(SEM)检查,透射电子显微镜(TEM)检查和能量色散x射线能谱(EDX)测绘,以表征导致电阻增加的变化。采用有限元模拟方法,利用铜线的有效直径计算了焊线电阻。实测值与仿真值具有可比性,最大偏差为0.32%。该方法为研究铜线接头的腐蚀效应提供了一种准确可靠的数据采集方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Methodology to determine high precision variation in the electrical resistance of copper wires due to corrosion
In reliability testing, integrated circuit (IC) packages are subjected to accelerated stress test according to the Joint Electron Device Engineering Council (JEDEC) standards to predict the lifetime under the operating conditions. Accelerated stress test on copper wire under the influence of moisture causes corrosion which leads to increase in electrical resistance. This paper describes a methodology to measure small resistance change across the bond wires. An approach of using ceramic packages to study bond wire resistance is introduced. Customized wire bonding layout is designed using bare copper wire bonded directly on the gold-plated lead frame. Four-wire measurement setup is applied to eliminate the unwanted test lead resistance. Two types of experiments are carried out to emulate different level of corrosion, namely unbiased highly accelerated temperature and humidity stress test (uHAST) and exposure to salt-acid solution. Physical characterization such as scanning electron microscopy (SEM) inspection, transmission electron microscopy (TEM) inspection and energy dispersive x-ray spectroscopy (EDX) mapping are conducted to characterize the changes that cause the increase in electrical resistance. By using finite element method (FEM) simulation, bond wire resistance is calculated using the effective diameter of copper wires. The values from measurement and simulation are comparable with maximum deviation of 0.32%. The proposed methodology provides an accurate and reliable data collection method for corrosion effect study of copper wire bond.
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