光学透明陶瓷晶体/非晶和非晶/非晶多层膜的合成与表征

Chelsea D. Appleget, A. Hodge
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引用次数: 4

摘要

摘要光学纳米多层膜(NMs)是耐用透明多功能涂层的有希望的候选者,其中界面和高透明度配置的贡献尚未被探索。为了解决这一问题,采用磁控溅射法制备了高透明度纳米材料(%T380-1100nm≈94-99%),并通过分光光度法、透射电镜和纳米压痕等方法表征了晶体/非晶态(AlN/SiO2、AlN/Al2O3)和非晶态/非晶态(TiO2/SiO2)界面的影响。我们证明了为提高透光率而调整层的结构会导致微观结构和多功能薄膜性能的实质性变化。总的来说,本工作提出了一种在界面特征和层微观结构背景下评估光学NMs结构-性质关系的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis and Characterization of Optically Transparent Ceramic Crystalline/Amorphous and Amorphous/Amorphous Multilayers
Abstract Optical nano multilayers (NMs) are promising candidates for durable transparent multifunctional coatings, where the contributions of interfaces and high transparency configurations have yet to be explored. To address this, high transparency NMs (%T380-1100nm≈94–99%) were synthesized by magnetron sputtering, and the effects of crystalline/amorphous (AlN/SiO2, AlN/Al2O3) and amorphous/amorphous (TiO2/SiO2) interfaces were characterized by spectrophotometry, transmission electron microscopy, and nanoindentation. We demonstrate that tuning layer configurations for improved transmittance resulted in substantial variations in microstructure and multifunctional film properties. Overall, this work presents a methodology for evaluating the structure-properties relationship in optical NMs in the context of interface character and layer microstructure.
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