低温固化非导电胶粘剂(NCA)和Sn-Ag焊料包覆40µm节距铜柱凸点制备的热压缩倒装焊点的可靠性及NCA捕获效应

Hwan-Pil Park, Seongchul Kim, Taeyoung Lee, S. Yoo, Young-Ho Kim, Jae-Yong Park
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引用次数: 1

摘要

本文研究了非导电胶粘剂(NCA)捕获对低温(150°C)热压(TC)粘合倒装芯片接头可靠性的影响。采用粗糙和光滑的铜衬垫,研究表面粗糙度对NCA捕获的影响,并通过低温TC键合将Sn-Ag焊料覆盖的铜柱凸起连接到Cu衬垫上。TC键合后,粗铜垫样品中的NCA捕获量远大于光滑铜垫样品。此外,随着键合压力的降低,NCA捕获量增加。经过预处理(湿度敏感等级3)和热循环(-55°C/125°C)可靠性测试后,粗糙和光滑铜垫样品的电阻均有所增加。铜衬垫粗糙试样的高电阻是由于捕获的NCA膨胀引起的裂纹扩展。倒装芯片连接的可靠性随着连接压力的增大和表面粗糙度的减小而增大。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Reliability and the Effect of NCA Trapping in Thermo-Compression Flip-Chip Solder Joints Fabricated Using Sn-Ag Solder Capped 40 µm Pitch Cu Pillar Bumps and Low Temperature Curable Non-Conductive Adhesive (NCA)
The effects of nonconductive adhesive (NCA) trapping on the reliability of low-temperature (150°C) thermo-compression (TC)-bonded flip-chip joints were investigated in this study. Both rough and smooth Cu pads were employed to investigate the effects of surface roughness on NCA trapping, with Sn-Ag solder-capped Cu pillar bumps bonded onto the Cu pads via low-temperature TC bonding. The NCA trapping in the rough Cu pad sample was much greater than that in the smooth Cu pad sample after TC bonding. In addition, the NCA trapping increased with decreasing bonding pressure. The electrical resistance for both the rough and smooth Cu pad samples increased after preconditioning (moisture sensitive level 3) and thermal cycling (-55°C/125°C) reliability tests. The high electrical resistance of the rough Cu pad sample was due to the crack propagation caused by the expansion of the trapped NCA. The reliability of the flip chip joint increased with increasing bonding pressure increased and decreasing surface roughness.
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