新兴晶体管结构中离子液体/离子凝胶门控的机遇

Rachel Owyeung, S. Sonkusale, M. Panzer
{"title":"新兴晶体管结构中离子液体/离子凝胶门控的机遇","authors":"Rachel Owyeung, S. Sonkusale, M. Panzer","doi":"10.1116/6.0000678","DOIUrl":null,"url":null,"abstract":"Ionic liquid/ionogel gate dielectrics can provide significant advantages for transistor architectures that utilize high surface area semiconductors and/or nonplanar substrates because of their cleanroom-free, liquid-based processability and their inherently large electrostatic double layer capacitance. These attributes of ionogels have already enabled the facile fabrication of several up-and-coming transistor devices geometries for which a highly conformal interface between the electrolyte gate dielectric and the semiconductor is readily achievable, and remote gating with a nonaligned gate electrode is possible. Further, ionogel gating can improve device performance to maximize current densities at low operating voltages. This Perspective highlights three classes of emerging transistor architectures, namely, vertical transistors, surround gate transistors, and thread/fiber-based transistors, and provides several key examples of instances where ionogel gating has either already enabled or still stands to improve device fabrication and performance.","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2021-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Opportunities for ionic liquid/ionogel gating of emerging transistor architectures\",\"authors\":\"Rachel Owyeung, S. Sonkusale, M. Panzer\",\"doi\":\"10.1116/6.0000678\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Ionic liquid/ionogel gate dielectrics can provide significant advantages for transistor architectures that utilize high surface area semiconductors and/or nonplanar substrates because of their cleanroom-free, liquid-based processability and their inherently large electrostatic double layer capacitance. These attributes of ionogels have already enabled the facile fabrication of several up-and-coming transistor devices geometries for which a highly conformal interface between the electrolyte gate dielectric and the semiconductor is readily achievable, and remote gating with a nonaligned gate electrode is possible. Further, ionogel gating can improve device performance to maximize current densities at low operating voltages. This Perspective highlights three classes of emerging transistor architectures, namely, vertical transistors, surround gate transistors, and thread/fiber-based transistors, and provides several key examples of instances where ionogel gating has either already enabled or still stands to improve device fabrication and performance.\",\"PeriodicalId\":17652,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0000678\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000678","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

离子液体/离子凝胶栅极电介质可以为利用高表面积半导体和/或非平面衬底的晶体管结构提供显著的优势,因为它们具有无尘室、基于液体的可加工性和固有的大静电双层电容。电离层凝胶的这些特性,已经使我们能够轻而易举地制造出几种极具发展前景的晶体管器件,这些器件的几何形状使得电解质栅极电介质和半导体之间的高度保形界面易于实现,并且可以使用不连续栅极进行远程门控。此外,离子凝胶门控可以提高器件性能,在低工作电压下最大化电流密度。本展望重点介绍了三种新兴晶体管架构,即垂直晶体管、环绕栅晶体管和基于螺纹/纤维的晶体管,并提供了几个关键示例,说明离子凝胶门控要么已经启用,要么仍然可以改善器件制造和性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Opportunities for ionic liquid/ionogel gating of emerging transistor architectures
Ionic liquid/ionogel gate dielectrics can provide significant advantages for transistor architectures that utilize high surface area semiconductors and/or nonplanar substrates because of their cleanroom-free, liquid-based processability and their inherently large electrostatic double layer capacitance. These attributes of ionogels have already enabled the facile fabrication of several up-and-coming transistor devices geometries for which a highly conformal interface between the electrolyte gate dielectric and the semiconductor is readily achievable, and remote gating with a nonaligned gate electrode is possible. Further, ionogel gating can improve device performance to maximize current densities at low operating voltages. This Perspective highlights three classes of emerging transistor architectures, namely, vertical transistors, surround gate transistors, and thread/fiber-based transistors, and provides several key examples of instances where ionogel gating has either already enabled or still stands to improve device fabrication and performance.
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