长准直BEaTriX抛物面镜薄膜涂层的性能研究

IF 1.7 3区 工程技术 Q2 ENGINEERING, AEROSPACE
N. Gellert, S. Massahi, B. Salmaso, D. Spiga, D. Ferreira, G. Vecchi, I. Ferreira, M. Bavdaz, S. Basso, S. Svendsen, Arne 'S Jegers, F. Christensen
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引用次数: 1

摘要

摘要涂有薄膜的长反射镜用于广泛的应用,例如聚焦或准直高能光学。入射x射线的聚焦是高能天文望远镜的主要应用之一,发散x射线源的准直用于实验装置来限制或扩展x射线辐射。这两种应用都利用掠掠角反射,通常使用x射线反射薄膜来增强。薄膜涂层面临的挑战之一是沉积引起的不均匀性。对于x射线反射镜,薄膜沉积的不均匀性会影响薄膜的厚度、粗糙度和密度,从而影响反射镜的预测性能。作为波束扩展测试x射线设备中使用的456毫米长的抛物面镜薄膜涂层开发的一部分,我们的工作提出了涂层长x射线反射镜的挑战。用x射线反射法研究了直流磁控溅射沉积的铂和铬薄膜的不均匀性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Performance of the thin film coating on the long and collimating BEaTriX parabolic mirror
Abstract. Long mirrors coated with thin films are used for a wide range of applications, e.g., focusing or collimating high-energy optics. Focusing of incident x-ray radiation is one of the major applications for high-energy astronomical telescopes, and collimation of divergent x-ray sources is used for experimental setups to confine or expand x-ray radiation. Both applications utilize grazing angle reflection, which is typically enhanced using x-ray reflective thin films. One of the challenges with thin film coatings is the deposition induced nonuniformities. For x-ray reflecting mirrors, nonuniformity in the thin film deposition influences the thickness, roughness, and density of the thin film, which affects the predicted performance of the mirror. As part of the thin film coating development for the 456-mm-long parabolic mirror used in the Beam Expander Testing X-ray facility, our work presents the challenge of coating long x-ray reflective mirrors. We used x-ray reflectometry to investigate the nonuniformity in platinum and chromium thin films deposited using direct current magnetron sputtering.
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来源期刊
CiteScore
4.40
自引率
13.00%
发文量
119
期刊介绍: The Journal of Astronomical Telescopes, Instruments, and Systems publishes peer-reviewed papers reporting on original research in the development, testing, and application of telescopes, instrumentation, techniques, and systems for ground- and space-based astronomy.
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