自热和纳米间隙填充因子对AlGaAs/GaAs无结DG-MOSFET早期诊断生物传感器的影响

Dipanjan Sen, Bijoy Goswami, Anup Dey, Priyanka Saha, S. Sarkar
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引用次数: 3

摘要

本文基于仿真分析了生物传感器形式的AlxGa1-xAs/GaAs无结双栅MOSFET (DG-MOSFET)的灵敏度参数,并考虑了纳米间隙填充和自加热问题。在这项工作中,在栅极氧化区引入了纳米间隙,作为捕获生物颗粒或生物分子的空腔。此外,通过结合介电调制方法考虑了生物传感器的灵敏度。因此,通过引入纳米间隙填充因子和温度变化来评估器件的整体性能。利用SILVACO ATLAS TCAD工具进行了大量的仿真。阈值电压变化或AVTH作为灵敏度参数,在低电压(VDs=0.2V)下,100%(完全填充)填充纳米间隙时灵敏度最高。因此,所解决的问题将有助于实现早期检测疾病的生物传感器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of Self-Heating and Nano-Gap Filling Factor on AlGaAs/GaAs Junction-Less DG-MOSFET Based Biosensor for Early Stage Diagnostics
This article demonstrates a simulation based analysis of sensitivity parameter of AlxGa1-xAs/GaAs Junction-less Double Gate MOSFET (DG-MOSFET) in the form of a biosensor by considering the Nano-Gap Filling and Self-Heating issue. In this work, a Nano-Gap has been introduced in the gate oxide region which acts as a cavity for trapping the bio-particles or biomolecules. Also, the sensitivity of the biosensor has been taken under consideration by incorporating the dielectric modulation method. Hence, the complete performance of the device has been evaluated by introducing the Nano-Gap Filling factor and Temperature Variation. Simulations have been performed extensively by using SILVACO ATLAS TCAD tool. Threshold Voltage change or AVTH is used as the sensitivity parameter, which shows highest sensitivity in case of 100% (Fully Filled) filled Nano-Gap at a low voltage (VDs=0.2V). Thus, the addressed issues will help in the realization of biosensors for early detection of diseases.
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