压电涂层驱动结构

ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1996-08-18 DOI:10.1109/ISAF.1996.598184

R. Noteboom, M. Sayer, D. A. Barrow

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引用次数: 0

摘要

压电涂层可引起钢膜在千赫兹频率范围内的弯曲模态振荡。介绍了这种宏观结构在薄膜厚度监测器设计中的应用。

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Driven structures using piezoelectric coatings

Flexure mode oscillations in steel membranes at frequencies in the kilohertz range can be induced by piezoelectric coatings. The application of such macroscopic structures in the design of film thickness deposition monitors are demonstrated.

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ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics

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