NiTi形状记忆合金表面Zr(C)N薄膜力学性能的纳米压痕研究

2010 3rd International Nanoelectronics Conference (INEC) Pub Date : 2010-03-04 DOI:10.1109/INEC.2010.5425083

C. Chu, H. L. Ji, C. Guo, X. Sheng, Y. S. Dong, P. Lin, T. Hu, P. Chu

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引用次数: 0

摘要

采用纳米压痕法研究了磁控溅射沉积在NiTi形状记忆合金(SMA)上的ZrN和ZrCN薄膜的表面纳米力学性能。通过与电抛光NiTi SMA的对比，提出并讨论了纳米压痕载荷作用下的表面变形机理。

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Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.

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2010 3rd International Nanoelectronics Conference (INEC)

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