溶胶凝胶法制备Pb/sub - 1-x/Ca/sub -x/ TiO/sub - 3/薄膜

ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1996-08-18 DOI:10.1109/ISAF.1996.602795

G. Teowee, K. McCarthy, T. Alexander, T. Bukowski, D. Uhlmann

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引用次数: 2

摘要

在镀铂的Si衬底上制备了一系列由溶胶-凝胶衍生的CaTiO/sub - 3/-PbTiO/sub - 3/薄膜，并在550 ~ 650℃的温度下进行了多次旋涂，在涂层之间的中间温度为400℃，得到了厚达0.5 /spl mu/m的薄膜。煅烧至600℃后，所有薄膜均为单相钙钛矿，介电常数随Ca量的变化在100-300之间，漏电流低至2&10/sup -9/ A/cm/sup 2/。

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Sol-gel derived Pb/sub 1-x/Ca/sub x/TiO/sub 3/ thin films

A series of sol-gel derived CaTiO/sub 3/-PbTiO/sub 3/ thin films were prepared on platinized Si substrates and fired to temperatures ranging from 550 C to 650 C. Multiple spincoating, with an intermediate firing of 400 C between coatings, was performed to obtain films up to 0.5 /spl mu/m thick. All the films were single phase perovskite after firing to 600 C. The dielectric constant ranged from 100-300 depending on the amount of Ca. Leakage currents as low as 2&10/sup -9/ A/cm/sup 2/ were obtained in these films.

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ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics

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