微波纹工艺制备可拉伸波浪形压电传感器

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI:10.1109/TRANSDUCERS.2019.8808712

Michitaka Yamamoto, K. Hiraoka, S. Takamatsu, T. Itoh

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引用次数: 1

摘要

我们开发了一种微波纹工艺，用于制造高度可拉伸人体运动传感器的垂直波浪形薄膜压电传感器。用齿轮将薄功能膜弯曲形成微波纹，形成波纹状结构。成功制备了一种节距为600µm、高度为140µm的连续波状结构聚偏二氟乙烯薄膜。该传感器承受15%的应变，并成功地检测到人类手指的弯曲运动。

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Stretchable Wavy Piezoelectric Sensor Fabricated by Micro-Corrugation Process

We developed a micro-corrugation process to fabricate a vertically wavy thin film piezoelectric sensor for highly stretchable human motion sensors. Wavy structure is formed by micro-corrugation process where thin functional film is bent with gears. A continuous wavy structured polyvinylidene difluoride film with 600-µm pitch and 140-µm height was successfully fabricated. The fabricated sensor sustains 15% strain and successfully detects the bending motion of the human finger.

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来源期刊

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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