γ辐照对NMOS阈值电压和通道迁移率退化的影响

Amonrat Kerdpradist, A. Ruangphanit, W. Titiroongruang, R. Muanghlua
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引用次数: 0

摘要

本文介绍了伽玛辐照对15纳米栅极氧化物厚度n沟道MOSFET器件阈值电压、表面迁移率和跨导的影响,该器件由泰国微电子中心采用0.8微米CMOS技术制备。然后以总剂量为1 ~ 10 $\mathbf{kGy}$的γ射线照射(Co-60)。通过进行5轮实验,观察器件暴露于伽马射线测量时阈值电压的变化,从饱和区域的IDSVs - VGs曲线中提取阈值电压(VTH)到表面迁移率$(Uo)$中。结果表明,与传统n沟道MOSFET相比,在最高剂量下阈值电压降低了约38%,因为在MOSFET SPICE参数的3级模型中提取了参数。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Effect of Gamma Irradiation on Threshold Voltage and Channel Mobility Degradation of NMOS
This paper presents the effect of Gamma Irradiated on threshold voltage, surface mobility and transconductance on N-channel MOSFET devices at a gate oxide thickness of 15 nanometers, which is fabricated at Thai Microelectronics Center by 0.8-micron CMOS technology. Then gamma irradiation (Co-60) at a total dose varied from 1 to 10 $\mathbf{kGy}$. By performing five rounds to observe changes in threshold voltage when the devices were exposed to gamma rays for measurement to extraction threshold Voltage (VTH) into the surface mobility $(Uo)$ from IDSVs VGs curves in the saturation region. As a result, the threshold Voltage reduces at highest dose by approximately 38% compared with conventional N-channel MOSFET, for a parameter extraction in the level 3 model for MOSFET SPICE parameters is presented.
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