原子垂直分辨率的量子阱纳米力学致动器

2007 7th IEEE Conference on Nanotechnology (IEEE NANO) Pub Date : 2007-12-01 DOI:10.1109/NANO.2007.4601158

J. D. Makowski, J. Talghader

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引用次数: 0

摘要

提出了一种新型的亚纳米分辨率连续可调垂直驱动器。它由一个异质结构悬臂组成，该悬臂坍塌在125 nm厚的纳米间隙上。它的工作原理依赖于两个InGaAs表面量子阱表面之间的粘附能的温度依赖性。从-17纳米到5纳米的偏转，其精度优于三个原子层。

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Quantum well nanomechanical actuators with atomic vertical resolution

A novel continuously tunable vertical actuator with sub-nanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum well surfaces. Deflections from -17 nm to 5 nm with a precision better than three atomic layers have been measured.

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2007 7th IEEE Conference on Nanotechnology (IEEE NANO)

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