磷酸-尿素电解沉积Co-Fe-W-P薄膜的合成与表征

IF 1.2 4区 地球科学 Q3 GEOCHEMISTRY & GEOPHYSICS
T. Christy, N. Thangaraj
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引用次数: 1

摘要

钴、铁和钨基(Co-Fe-W)薄膜及其副产品薄膜由于其优越的光滑磁性结构,在微电子和微机电系统中有着广泛的应用。由于简单,成本效益和可控的图案,电镀方法已被用于CoFeW薄膜的制造。在不含尿素的磷溶剂浴中,电沉积了CoFeW和使磷的CoFeW薄膜。研究了镀液、电解液注意、外加电流密度和溶液搅拌对沉积电荷的影响。对薄膜的组成、形貌、晶体结构、磁矩和矫顽力进行了表征,并与沉积条件(如有无组分和沉积电流密度)进行了比较。对镀液的加速意识导致沉积速度明显加快,并促进清洁薄膜的增加,同时限制开裂。沉积的CoFeWP合金薄膜具有铁磁性和纳米晶结构。在我们的观察中,我们确定了电解质情况并进行了前沿值影响薄膜的磁性和磁化率。铜衬底被用作磁性薄膜的模板。利用x射线衍射研究了薄膜的结构特征。电沉积磁性薄膜的晶体尺寸和结构主要根据文献中描述的成分比略有波动。通过对薄膜的评估发现,随着电解质浓度和电流密度值的增加,其磁化率向低面的方向移动。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis and Characterisation of Co-Fe-W-P Thin Films Electrodeposited Under Phosphorous Acid and Urea Electrolyte Solution
Cobalt, iron, and tungsten-primarily based (Co-Fe-W) thin films and their by-product thin films have vast applications in microelectronics and micro-electro-mechanical systems due to their superior smooth magnetic residences. With the blessings of simplicity, cost-effectiveness, and controllable patterning, electroplating approaches have been hired for CoFeW thin films fabrication. The electrodeposition of CoFeW and phosphorus-enabled CoFeW thin films were completed from the phosphorus solvent bath without components specifically urea. The results of bath, electrolyte attention, applied current density, and solution agitation on deposition charge has been studied. Thin films composition, morphology, crystallographic structure as well as magnetic moment, and coercivity have been characterized and as compared in opposition to the deposition conditions such as with and without components and deposition current densities. An accelerated awareness of the bath solution results in significantly quicker deposition and promotes clean thin films increase with confined cracking. As-deposited CoFeWP alloy films are observed to be ferromagnetic and nanocrystalline. In our observations, we located that electrolyte situations and carried out cutting-edge values affect the magnetism and susceptibility of thin films. Copper substrates had been used as templates for magnetic thin films. X-ray diffraction studies were conducted to research the structural traits of thin films. The crystal size and structure of the electrodeposited magnetic thin films fluctuate slightly primarily based on the composition ratio described inside the literature. As a result of assessment with thin films, their magnetic susceptibility shifted in the direction of the lower facet with increasing electrolyte concentration and current density value.
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来源期刊
Periodico Di Mineralogia
Periodico Di Mineralogia 地学-地球化学与地球物理
CiteScore
1.50
自引率
14.30%
发文量
0
审稿时长
>12 weeks
期刊介绍: Periodico di Mineralogia is an international peer-reviewed Open Access journal publishing Research Articles, Letters and Reviews in Mineralogy, Crystallography, Geochemistry, Ore Deposits, Petrology, Volcanology and applied topics on Environment, Archaeometry and Cultural Heritage. The journal aims at encouraging scientists to publish their experimental and theoretical results in as much detail as possible. Accordingly, there is no restriction on article length. Additional data may be hosted on the web sites as Supplementary Information. The journal does not have article submission and processing charges. Colour is free of charges both on line and printed and no Open Access fees are requested. Short publication time is assured. Periodico di Mineralogia is property of Sapienza Università di Roma and is published, both online and printed, three times a year.
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