金属丝粘接力学性能的再评价

A. Jalar, M. Zulkifli, N. Othman, S. Abdullah
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引用次数: 4

摘要

线键合是微电子封装中最常用的互连技术,由于其成熟和成本效益。微型化和多功能化时代的技术进步促使人们需要更小的线键尺寸来应对键垫间距的减小。最终,这将引入许多技术挑战,在表征和性能的线键合微机械性能。传统的试验,如拉线和球剪试验,在连接和冶金响应方面提供的信息不足。这是因为基于常规试验的钢丝粘结性能评价更多地是定性结果或失效模式,而不是详细的定量结果。此外,随着球黏结直径的减小,拉丝和球剪切试验的结果也会发生变化,产生很大的变化。在分析中引入纳米压痕测试是为了提供更充分的信息来了解焊丝结合的质量。纳米压痕测试在小长度尺度上提供了硬度和降低模量的微观力学性能。这将有利于线键微观力学性能的测量。此外,纳米压痕试验提供的连续刚度测量实现了材料变形、应变硬化效应和蠕变行为等定性结果。采用热超声焊线技术,在铝焊盘上制备了直径为25 μm的金丝焊线。纳米压痕测试是在压痕处理前对角线横截面的球键上的不同位置进行的。为了进一步研究压痕的微观力学性能,将压痕的位置划分为1区和2区。1区位于Au和Al金属间层附近区域,2区位于毛细管内倒角形成的变形球键处。结果表明,随着压痕位置的不同,球粘结剂的微观力学性能有所不同。区1的压痕硬度和降低模量的平均值高于区2的压痕。1区压痕的硬度平均值为1.011 GPa,降低模量平均值为88.652 GPa。2区压痕的硬度平均值为0.853 GPa,降低模量平均值为70.652 GPa。另外,1区压痕1位于毛细末端产生的变形效应垂直方向,硬度最高,为1.156 GPa。区1的压痕3和压痕4的硬度值最低,分别为0.928 GPa和0.834 GPa。硬度和折减模量与材料的屈服强度和扩散系数有关。因此,至少从冶金学的角度来看,纳米压痕试验的结果有助于解释球键的强化和粘合性。因此,在常规试验的基础上,采用纳米压痕试验对金属丝键合材料的力学性能进行重新评价是一种合适的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The re-evaluation of mechanical properties of wire bonding
Wire bonding is the most popular interconnection technique that has been used in microelectronics packaging due to its maturity and cost effectiveness. The technology advances in the era of miniaturization and multifunction have urges the need for the smaller wire bond size to cope with the decrease of bond pad pitches. Ultimately, this will introduces al lot of technology challenges in the characterization and performance of wire bonding micromechanical properties. The conventional tests such as wire pull and ball shear tests provide inadequate information in respect of bonding and metallurgical response of the interconnection. This is because the evaluations of wire bond performance based on conventional tests are more into qualitative results or failure modes rather than detailed quantitative results. Furthermore, the results obtained through wire pull and ball shear tests will change and introduce a lot of variations as the ball bond diameter become smaller. In the present analysis, nanoindentation test was introduced in order to provide more adequate information about the quality of wire bond. Nanoindentation test provides the micromechanical properties in terms of hardness and reduced modulus value in the small length scale. This will facilitate the micromechanical properties measurement of the wire bond. In addition, the continuous measurement of stiffness provided from nanoindentation test realizes the qualitative results of materials such as deformation, strain hardening effect and creep behaviour. Wire bonding process was prepared using thermosonic wire bonding technology using 25 μm diameter of gold wire on the Aluminium bond pad. The nanoindentation test was conducted at various locations on the ball bond that has been cross-sectioned diagonally prior to the indentation process. To further investigate the micromechanical properties, the location of indentations was divided into two zones namely Zone 1 and Zone 2. Zone 1 is located at the area near to the intermetallic layer of Au and Al, while Zone 2 is located at deformed ball bond created from the inner chamfer of capillary. The results show that the micromechanical properties of ball bond vary throughout the location of indentations. The hardness and the reduced modulus for the indentations that located at the Zone 1 have higher average values compared to that of the indentations that located at the Zone 2. The average value of hardness and reduced modulus for the indentations at the Zone 1 are 1.011 GPa and 88.652 GPa, respectively. While the average value of hardness and reduced modulus for the indentations at the Zone 2 are 0.853 GPa and 70.652 GPa, respectively. In addition, indentation 1 of Zone 1 that located perpendicular to the effect of deformation created from the end of capillary has the highest value of hardness with value of 1.156 GPa. The value of hardness for the indentations 3 and 4 of Zone 1 has the lowest value of hardness with value of 0.928 GPa and 0.834 GPa, respectively. It is known that the hardness and the reduced modulus are related with the yield strength and diffusivity of materials. Thus, the results obtained from nanoindentation test are useful in explaining the strengthening and bondability of ball bond, at least from metallurgical point of view. Therefore, the nanoidentation test is suitable approach to re-evaluate the mechanical properties of wire bonding in addition to the conventional tests.
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