基于铁电薄膜的压电和热释电微系统

ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1996-08-18 DOI:10.1109/ISAF.1996.602725

P. Muralt

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引用次数: 3

摘要

本文综述了PbZr/sub -x/ Ti/sub - 1-x/O/sub - 3/ (PZT)薄膜在超声微电机和热释电红外探测器中的沉积、集成和器件制作的不同方面。这种薄膜的沉积和将其集成到硅衬底上的主要过程已经相当好地掌握了。目前的工作集中在为各种应用量身定制薄膜性能，以及优化器件设计和图案化工艺。

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Piezoelectric and pyroelectric microsystems based on ferroelectric thin films

The paper reviews different aspects of deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-x/O/sub 3/ (PZT) films for application in ultrasonic micromotors and pyroelectric infra-red detectors. The deposition of such films and the principal processes for their integration onto silicon substrates are fairly well mastered. Current efforts concentrate on tailoring the film properties for the various applications, and on optimization of the device designs and patterning processes.

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ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics

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