离子敏感场效应管中表面反应引起的界面电荷和化学噪声模型

2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) Pub Date : 2019-09-01 DOI:10.1109/SISPAD.2019.8870563

Leandro Julian Mele, P. Palestri, L. Selmi

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引用次数: 6

摘要

我们提出了一个固体和电解质界面上任意化学反应的模型，旨在计算干扰离子存在下离子敏感场效应管的界面电荷积聚和表面电位移动。并推导了表面电荷波动的均方根值和离子浓度的不确定度表达式。展示了在纳米电子离子和蛋白质传感器中的应用。

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A model of the interface charge and chemical noise due to surface reactions in Ion Sensitive FETs

We present a model of arbitrary chemical reactions at the interface between a solid and an electrolyte, aimed at computing the interface charge build-up and surface potential shift of ion-sensitive FETs in the presence of interfering ions. An expression for the rms value of the surface charge fluctuation and the resulting uncertainty in the ion concentration is derived as well. Application to nanoelectronic ISFET-based sensors for ions and proteins is demonstrated.

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来源期刊

2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

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