溶剂对溶胶-凝胶沉积SnO2气敏膜形成的影响

2012 IEEE International Conference on Oxide Materials for Electronic Engineering (OMEE) Pub Date : 2012-09-01 DOI:10.1109/OMEE.2012.6464861

A. Ponomareva, V. Moshnikov

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引用次数: 1

摘要

研究了溶胶-凝胶沉积SiO2-SnO2纳米复合膜的表面形貌及其光学和气敏性能。采用分形理论对溶胶-凝胶沉积膜的纳米结构进行了定量分析。在UV/VIS范围内测量了光学性能。分析了薄膜的乌尔巴赫能和光能隙等特性。导出了气敏系统的基本气敏特性(灵敏度、响应和恢复时间)。

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Influence of solvents on sol-gel deposited SnO2 gas-sensitive film formation

The surface topography of sol-gel deposited SiO2-SnO2 nanocomposite films obtained by using different solvents as well their optical and gas sensing properties were investigated. An approach based on the theory of fractals was used to quantify the nanostructure of sol-gel deposited films. Optical properties were measured in the UV/VIS ranges. Film properties such as Urbach energy and optical energy gap were analyzed. Basic gas sensitive characteristics (sensitivity, response and recovery time) of were derived.

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2012 IEEE International Conference on Oxide Materials for Electronic Engineering (OMEE)

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