新型SAC-Bi焊点对晶圆级芯片封装电迁移可靠性的影响

M. Tsai, Yung-Sheng Lin, C. Kao, Shan-Bo Wang, T. Lin, Y. Hung
{"title":"新型SAC-Bi焊点对晶圆级芯片封装电迁移可靠性的影响","authors":"M. Tsai, Yung-Sheng Lin, C. Kao, Shan-Bo Wang, T. Lin, Y. Hung","doi":"10.4071/1085-8024-2021.1.000136","DOIUrl":null,"url":null,"abstract":"\n The Sn-4Ag-0.5Cu base solder adding 3 wt.% bismuth (SAC-3Bi) solder has better drop and thermal cycling performance than Sn-4Ag-0.5Cu solder due the excellent mechanical properties in previous study. Therefore, SAC-3Bi has applied in solder joints of wafer level chip scale packaging (WLCSP) in recent year. In this study, SAC-3Bi solder was used on WLCSP device to evaluate electromigration reliability. A specially designed test vehicle for SAC-3Bi solder balls with 200μm diameter Ti/Cu/Cu UBM have been investigated experimentally. The electromigration behavior of solder balls was investigated in terms of the electrical resistance change, and the mechanism was also explored by the microstructure evolutions. The electromigration experiment of the SAC-3Bi solder balls was conducted continuously at 1.2 A to 1.6 A under 170 °C to 185 °C condition. The resistance of solder balls was monitored according to Kelvin structure. An EM prediction model of SAC-3Bi solder balls was built based on Black-type electromigration time to failure equation, followed the JEDEC with five test conditions. The activation energy of SAC-3Bi solder is 0.80 eV ± 0.02 eV, coinciding the activation energy of SAC based solder alloy (0.72 eV ~ 0.89 eV). The microstructure of the solder balls was investigated using a scanning electron microscope (SEM) accompanying energy-dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD) for the failure behaviors and phase characterization. There were intermetallic compounds of Cu3Sn and Cu6Sn5 at the interface of copper and solder. We observed two failure modes of SAC-3Bi solder balls during current stressing, the fracture occurred at the UBM/solder ball interface and Cu redistribution layer (RDL), respectively. The failure mechanisms have been investigated in detail from microstructure analysis.","PeriodicalId":14363,"journal":{"name":"International Symposium on Microelectronics","volume":"109 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Effect of Novel SAC-Bi Solder Joints on Electromigration Reliability for Wafer Level Chip Scale Packages\",\"authors\":\"M. Tsai, Yung-Sheng Lin, C. Kao, Shan-Bo Wang, T. Lin, Y. Hung\",\"doi\":\"10.4071/1085-8024-2021.1.000136\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n The Sn-4Ag-0.5Cu base solder adding 3 wt.% bismuth (SAC-3Bi) solder has better drop and thermal cycling performance than Sn-4Ag-0.5Cu solder due the excellent mechanical properties in previous study. Therefore, SAC-3Bi has applied in solder joints of wafer level chip scale packaging (WLCSP) in recent year. In this study, SAC-3Bi solder was used on WLCSP device to evaluate electromigration reliability. A specially designed test vehicle for SAC-3Bi solder balls with 200μm diameter Ti/Cu/Cu UBM have been investigated experimentally. The electromigration behavior of solder balls was investigated in terms of the electrical resistance change, and the mechanism was also explored by the microstructure evolutions. The electromigration experiment of the SAC-3Bi solder balls was conducted continuously at 1.2 A to 1.6 A under 170 °C to 185 °C condition. The resistance of solder balls was monitored according to Kelvin structure. An EM prediction model of SAC-3Bi solder balls was built based on Black-type electromigration time to failure equation, followed the JEDEC with five test conditions. The activation energy of SAC-3Bi solder is 0.80 eV ± 0.02 eV, coinciding the activation energy of SAC based solder alloy (0.72 eV ~ 0.89 eV). The microstructure of the solder balls was investigated using a scanning electron microscope (SEM) accompanying energy-dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD) for the failure behaviors and phase characterization. There were intermetallic compounds of Cu3Sn and Cu6Sn5 at the interface of copper and solder. We observed two failure modes of SAC-3Bi solder balls during current stressing, the fracture occurred at the UBM/solder ball interface and Cu redistribution layer (RDL), respectively. The failure mechanisms have been investigated in detail from microstructure analysis.\",\"PeriodicalId\":14363,\"journal\":{\"name\":\"International Symposium on Microelectronics\",\"volume\":\"109 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on Microelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.4071/1085-8024-2021.1.000136\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Microelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4071/1085-8024-2021.1.000136","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

由于前人研究的优异力学性能,添加3wt .%铋(SAC-3Bi)的Sn-4Ag-0.5Cu钎料具有比Sn-4Ag-0.5Cu钎料更好的下降和热循环性能。因此,SAC-3Bi近年来在晶圆级芯片级封装(WLCSP)的焊点中得到了应用。本研究采用SAC-3Bi焊料对WLCSP器件进行电迁移可靠性评估。对直径为200μm Ti/Cu/Cu UBM的SAC-3Bi焊料球进行了实验研究。从电阻变化的角度研究了焊锡球的电迁移行为,并从微观结构演变的角度探讨了电迁移的机理。在170℃~ 185℃条件下,对SAC-3Bi焊锡球进行了1.2 ~ 1.6 A的连续电迁移实验。根据开尔文结构对焊锡球的电阻进行了监测。基于Black-type电迁移至失效时间方程建立了SAC-3Bi焊锡球的电磁预测模型,并建立了五种试验条件下的JEDEC模型。SAC- 3bi钎料的活化能为0.80 eV±0.02 eV,与SAC基钎料合金的活化能(0.72 eV ~ 0.89 eV)一致。利用扫描电子显微镜(SEM)、能量色散x射线能谱仪(EDS)和电子背散射衍射仪(EBSD)对钎料球的微观结构进行了研究,分析了钎料球的失效行为和物相特征。在铜与钎料界面处存在Cu3Sn和Cu6Sn5金属间化合物。在电流应力作用下,SAC-3Bi钎料球有两种破坏模式,分别发生在钎料/钎料球界面处和Cu重分布层处。从微观结构分析入手,详细探讨了其破坏机理。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Novel SAC-Bi Solder Joints on Electromigration Reliability for Wafer Level Chip Scale Packages
The Sn-4Ag-0.5Cu base solder adding 3 wt.% bismuth (SAC-3Bi) solder has better drop and thermal cycling performance than Sn-4Ag-0.5Cu solder due the excellent mechanical properties in previous study. Therefore, SAC-3Bi has applied in solder joints of wafer level chip scale packaging (WLCSP) in recent year. In this study, SAC-3Bi solder was used on WLCSP device to evaluate electromigration reliability. A specially designed test vehicle for SAC-3Bi solder balls with 200μm diameter Ti/Cu/Cu UBM have been investigated experimentally. The electromigration behavior of solder balls was investigated in terms of the electrical resistance change, and the mechanism was also explored by the microstructure evolutions. The electromigration experiment of the SAC-3Bi solder balls was conducted continuously at 1.2 A to 1.6 A under 170 °C to 185 °C condition. The resistance of solder balls was monitored according to Kelvin structure. An EM prediction model of SAC-3Bi solder balls was built based on Black-type electromigration time to failure equation, followed the JEDEC with five test conditions. The activation energy of SAC-3Bi solder is 0.80 eV ± 0.02 eV, coinciding the activation energy of SAC based solder alloy (0.72 eV ~ 0.89 eV). The microstructure of the solder balls was investigated using a scanning electron microscope (SEM) accompanying energy-dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD) for the failure behaviors and phase characterization. There were intermetallic compounds of Cu3Sn and Cu6Sn5 at the interface of copper and solder. We observed two failure modes of SAC-3Bi solder balls during current stressing, the fracture occurred at the UBM/solder ball interface and Cu redistribution layer (RDL), respectively. The failure mechanisms have been investigated in detail from microstructure analysis.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信