用于组织表征的薄膜ZnO超声换能器

ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1996-08-18 DOI:10.1109/ISAF.1996.602715

Y. Ito, K. Yokosawa, S. Sano, R. Shinomura, Y. Sato

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引用次数: 2

摘要

制备了工作频率为140 MHz的薄膜ZnO超声换能器，并对其在组织表征中的应用进行了评估。成功地生长出12.5-/spl μ m厚的高取向ZnO薄膜，作为传感器使用，具有足够的灵敏度来检测活体样品内的小超声信号。ZnO换能器安装在杆状探针中，杆状探针可以绕其轴进行机械旋转并沿轴移动。利用这种扫描，在组织内的圆柱形平面上以c扫描模式形成组织图像。初步的牛肾图像证明了使用安装在杆状探针上的微型高频传感器进行组织成像的可行性。

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Thin-film ZnO ultrasonic transducers for tissue characterization

Thin-film ZnO ultrasonic transducers for operation at 140 MHz mounted in a rod-shaped probe were fabricated and evaluated for use in tissue characterization. Highly oriented ZnO films 12.5-/spl mu/m thick were successfully grown for use as transducers having sufficient sensitivity to detect small ultrasound signals inside living samples. The ZnO transducer was mounted in the rod-shaped probe which could rotate mechanically around its axis and shift along the axis. Using this scanning, tissue images were formed in the C-scan mode in a cylindrical plane within the tissue. Preliminary bovine kidney images demonstrate the feasibility of tissue imaging using the miniature, high-frequency transducers mounted in the rod-shaped probe.

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ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics

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