体声波盘式陀螺仪的静电频率调谐

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI:10.1109/IFCS-ISAF41089.2020.9234820

Madan Parajuli, G. Sobreviela, A. Seshia

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引用次数: 4

摘要

体声波陀螺仪具有抗冲击、抗振动和高Q因子等潜在优势。本文提出了一种利用静电频率调谐来解决体声波盘式陀螺仪模式匹配问题的方法。静电频率调谐是通过改变谐振器本体和圆盘谐振器周围电极之间的电位差来实现的。在这项工作中，驱动和感知模式的频率调谐被证明是实现模式匹配的一种手段。实验结果与COMSOL模拟结果进行了比较，报告了模型的匹配性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Electrostatic Frequency Tuning of Bulk Acoustic Wave Disk Gyroscopes

Bulk acoustic wave gyroscopes have been researched for potential benefits such as immunity to shock and vibration and the high Q factors achievable with the bulk modes. This paper outlines an approach to address mode matching in bulk acoustic wave (BAW) disk gyroscopes using electrostatic frequency tuning. Electrostatic frequency tuning is achieved by varying the potential difference between the body of the resonator and electrodes surrounding the disk resonator. Tuning of the frequencies of both drive and sense modes is demonstrated in this work as a means to achieving mode matching. The experimental results are also compared to COMSOL simulations reporting mode matching.

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来源期刊

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)

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