单段热蒸发沉积CuIn0.7Ga0.3Se2薄膜的表征

H. Karaagac, Elif Peksu, H. Behzad, S. Akgoz, M. Parlak
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摘要

采用单级热蒸发法制备了CuIn0.7Ga0.3Se2 (CIGS)薄膜。x射线光电子能谱测量表明,生长的CIGS薄膜表面存在富Cu和富ga。生长后退火过程导致金属原子在结晶过程中从表面区域迁移到体中,从而导致反射的显著减少和传导机制的改变。光电导率测量结果表明,在不同的光照强度下,沉积的CIGS薄膜的电阻率显著降低。利用原子力显微镜和x射线衍射仪分别研究了生长后退火对CIGS薄膜形貌和结构的影响。结果表明,在不同的退火温度下,薄膜的表面粗糙度和结晶度都发生了显著的变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of CuIn0.7Ga0.3Se2 Thin Films Deposited by Single Stage Thermal Evaporation Process
Single phase CuIn0.7Ga0.3Se2 (CIGS) thin films are successfully deposited on glass substrates via a single stage thermal evaporation from a stoichiometric powder of CIGS. X-ray photoelectron spectroscopy measurements reveal the existence of Cu- and Ga-rich surface of the as-grown CIGS thin films. The post-growth annealing process lead to migration of the metallic atoms from the surface region into the bulk during the crystallization process, which subsequently causes a significant reduction in the reflection and a change in the mechanism of conduction. From the photoconductivity measurements it was deduced that the deposited CIGS films demonstrated a drastic decrease in resistivity under different illumination intensities. The post-growth annealing effect on the morphology and structure of CIGS thin films is investigated by means of the atomic force microscopy and X-ray diffraction measurements, respectively. Results show that there is a significant change in surface roughness as well as in degree of crystallinity of the films following the annealing process at different temperatures.
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