An electrohydrodynamically driven microfabricated actuator for the study of miniature ion propulsion engine and electric wind devices

For the study of miniature ion propulsion engine and electric wind devices, we have developed an electrohydrodynamically (EHD) driven microfabricated actuator. It consumes a maximum power of 100 mW and has a maximum resultant driving force of 0.45 /spl mu/N in the first observed driving mode. The actuator consists of a mass/spring configuration fabricated with dual ion drives for propulsion. DC partial electrical discharge produces and accelerates the ions. Electric wind is generated by the momentum transfer from the ions to the air. Momentum is also transferred by virtue of the formation of intermittent space charge near the ionization zone. A selection between single and dual ion drives allows observation of various oscillation modes beginning at 896 Hz. The maximum out-of-plane oscillation amplitude measured was approximately 2 /spl mu/m.