{"title":"纳米硅化铜的衬底驱动生长机理及其应用","authors":"S. Sen, Prajakta Kanitkar, K. Muthe","doi":"10.1080/02670836.2023.2199570","DOIUrl":null,"url":null,"abstract":"The growth mechanism of various nanoforms of copper/copper silicide on Si substrates with different orientations is reported here. The triangular, square and rectangular copper/copper silicide nanostructures are deposited on silicon substrates with (111), (100) and (110) orientations respectively, by thermal evaporation of metallic copper at different substrate temperatures. Investigations confirm that the nanostructures consist of a pure copper layer on top of a copper silicide layer. The morphology and growth behaviour studies confirmed for the first time that the formation of well-defined structures and shapes are governed by the Si substrate orientation and the surface reconstruction of the Si planes. The copper silicide nanostructures are used in field emission applications and also serve as a template for the growth of carbon nano-fibre.","PeriodicalId":18232,"journal":{"name":"Materials Science and Technology","volume":"19 1","pages":"2341 - 2352"},"PeriodicalIF":1.7000,"publicationDate":"2023-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Understanding substrate-driven growth mechanism of copper silicide nanoforms and their applications\",\"authors\":\"S. Sen, Prajakta Kanitkar, K. Muthe\",\"doi\":\"10.1080/02670836.2023.2199570\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The growth mechanism of various nanoforms of copper/copper silicide on Si substrates with different orientations is reported here. The triangular, square and rectangular copper/copper silicide nanostructures are deposited on silicon substrates with (111), (100) and (110) orientations respectively, by thermal evaporation of metallic copper at different substrate temperatures. Investigations confirm that the nanostructures consist of a pure copper layer on top of a copper silicide layer. The morphology and growth behaviour studies confirmed for the first time that the formation of well-defined structures and shapes are governed by the Si substrate orientation and the surface reconstruction of the Si planes. The copper silicide nanostructures are used in field emission applications and also serve as a template for the growth of carbon nano-fibre.\",\"PeriodicalId\":18232,\"journal\":{\"name\":\"Materials Science and Technology\",\"volume\":\"19 1\",\"pages\":\"2341 - 2352\"},\"PeriodicalIF\":1.7000,\"publicationDate\":\"2023-04-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Science and Technology\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1080/02670836.2023.2199570\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science and Technology","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1080/02670836.2023.2199570","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Understanding substrate-driven growth mechanism of copper silicide nanoforms and their applications
The growth mechanism of various nanoforms of copper/copper silicide on Si substrates with different orientations is reported here. The triangular, square and rectangular copper/copper silicide nanostructures are deposited on silicon substrates with (111), (100) and (110) orientations respectively, by thermal evaporation of metallic copper at different substrate temperatures. Investigations confirm that the nanostructures consist of a pure copper layer on top of a copper silicide layer. The morphology and growth behaviour studies confirmed for the first time that the formation of well-defined structures and shapes are governed by the Si substrate orientation and the surface reconstruction of the Si planes. The copper silicide nanostructures are used in field emission applications and also serve as a template for the growth of carbon nano-fibre.
期刊介绍:
《Materials Science and Technology》(MST) is an international forum for the publication of refereed contributions covering fundamental and technological aspects of materials science and engineering.