Chien-Ping Wang, Ying-Chun Shen, Kun-Lin Liou, Y. Chueh, Y. Chih, Jonathan Chang, J. Shih, C. Lin, Y. King
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Hair-Like Nanostructure Based Ion Detector by 16nm FinFET Technology
A novel hair-like nanostructure incorporated a floating gate Ion-Sensitivities Field Effect Transistor (ISFET) is demonstrated for the first time. With its corresponding readout circuit embedded by 16nm FinFET technology, the proposed ion detector features high sensitivity and wide/adjustable dynamic range. Additionally, real-time detection of both pH level and sodium ion concentration on liquid samples is verified, while their noise analysis for robust and stable reading is performed.
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