压电驱动点胶器喷嘴板的防湿沟槽

2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference Pub Date : 2009-10-01 DOI:10.1109/IMPACT.2009.5382277

Chunping Lu, Wen-Chieh Liu, Chun-Jung Chen, C. Fu

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引用次数: 12

摘要

我们开发了一种采用低能耗执行器的高流量稳定的液体点胶系统。它是由具有系统谐振频率的压电(PZT)致动多孔膜制成，运动部件相对较小，结构坚固。利用从水滴到蒸汽相变过程中的高潜热，我们能够从超过100W的热体表面去除热量，并将点胶系统作为冷却应用。

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Anti-wetting trench of nozzle plate for piezoelectric actuating dispenser

We have developed a high flow rate stable liquid dispensing system by using a low energy consumption actuator. It is made of a piezoelectric (PZT) actuating porous membrane with the resonant frequency of the system, featuring relatively small movement parts with a robust structure. Taking advantage of the high latent heat during phase changes from water droplet to vapor, we were able to remove heat from a hot body surface of over 100W with the dispensing system as cooling application.

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2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference

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