替代石墨烯器件:超越场效应晶体管

M. Lemme, S. Vaziri, A. D. Smith, M. Ostling
{"title":"替代石墨烯器件:超越场效应晶体管","authors":"M. Lemme, S. Vaziri, A. D. Smith, M. Ostling","doi":"10.1109/DRC.2012.6257028","DOIUrl":null,"url":null,"abstract":"The future manufacturability of graphene devices depends on the availability of large-scale graphene fabrication methods. While chemical vapor deposition and epitaxy from silicon carbide both promise scalability, they are not (yet) fully compatible with silicon technology. Direct growth of graphene on insulating substrates would be a major step, but is still at a very early stage [1]. This has implications on potential entry points of graphene as an add-on to mainstream silicon technology, which will be discussed in the talk.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"70 1","pages":"24a-24b"},"PeriodicalIF":0.0000,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Alternative graphene devices: beyond field effect transistors\",\"authors\":\"M. Lemme, S. Vaziri, A. D. Smith, M. Ostling\",\"doi\":\"10.1109/DRC.2012.6257028\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The future manufacturability of graphene devices depends on the availability of large-scale graphene fabrication methods. While chemical vapor deposition and epitaxy from silicon carbide both promise scalability, they are not (yet) fully compatible with silicon technology. Direct growth of graphene on insulating substrates would be a major step, but is still at a very early stage [1]. This has implications on potential entry points of graphene as an add-on to mainstream silicon technology, which will be discussed in the talk.\",\"PeriodicalId\":6808,\"journal\":{\"name\":\"70th Device Research Conference\",\"volume\":\"70 1\",\"pages\":\"24a-24b\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-06-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"70th Device Research Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DRC.2012.6257028\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"70th Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2012.6257028","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

摘要

未来石墨烯器件的可制造性取决于大规模石墨烯制造方法的可用性。虽然化学气相沉积和碳化硅外延都承诺可扩展性,但它们(尚未)与硅技术完全兼容。在绝缘衬底上直接生长石墨烯将是重要的一步,但仍处于非常早期的阶段[1]。这意味着石墨烯作为主流硅技术的附加组件的潜在切入点,这将在演讲中讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Alternative graphene devices: beyond field effect transistors
The future manufacturability of graphene devices depends on the availability of large-scale graphene fabrication methods. While chemical vapor deposition and epitaxy from silicon carbide both promise scalability, they are not (yet) fully compatible with silicon technology. Direct growth of graphene on insulating substrates would be a major step, but is still at a very early stage [1]. This has implications on potential entry points of graphene as an add-on to mainstream silicon technology, which will be discussed in the talk.
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