面向制造业的先进5nm BEOL集成开发

Jungil Park, Jeonghoon Ahn, Y. Yoon, Yunki Choi, Junki Jang, Miji Lee
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引用次数: 4

摘要

介绍了一种基于极紫外(EUV)光刻工艺、原子层沉积(ALD)阻挡金属(BM)和Cu回流工艺的先进5nm节点后端线(BEOL)工艺集成。在大马士革金属化过程中,ALD - BM技术被集成到Low-k中。与物理气相沉积(PVD) BM相比,这种先进的BEOL集成显示出良好的RC(电阻-电容)性能在+3%以内,通孔电阻降低了46%,并且满足了时变介电击穿(TDDB)和电迁移(EM)的可靠性要求。最后,针对先进的5nm节点BEOL集成,开发了ALD - BM和Cu回流工艺,并实现了低通孔电阻和更好的器件性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advanced 5nm BEOL integration development for manufacuring
This paper describes an advanced 5nm node back-end-of-line (BEOL) process integration based on an extreme ultraviolet (EUV) lithography process, atomic layer deposition (ALD) barrier metal (BM) and Cu reflow process. The ALD BM technology was integrated into Low-k in the damascene metallization. This advanced BEOL integration showed a good RC (resistance-capacitance) performance within +3% and an excellent 46% reduction in the via resistance compared to the physical vapor deposition (PVD) BM, and satisfied the reliability requirement for the time-dependent dielectric breakdown (TDDB) and the electro-migration (EM). Finally, ALD BM and Cu reflow process were developed for the advanced 5nm node BEOL integration, and the new process is implemented in order to achieve low via resistance and better device performance.
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