先进FinFET节点的智能缩放技术

J. Kye, Hoonki Kim, J. Lim, Seungyoung Lee, Jonghoon Jung, T. Song
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引用次数: 3

摘要

由于技术的复杂性,技术和设计之间的接触程度比以往任何时候都要高。设计技术协同优化(DTCO)用于描述在各种应用中具有竞争力、性能、面积和良率(PPAY)的制造过程。本文介绍了先进的FinFET节点的智能缩放技术,使技术更具竞争力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Smart scaling technology for advanced FinFET node
Because of the complexity of technology the level of engagement between technology and design has been increased more than ever before. Design technology co-optimization (DTCO) is used to describe the process of making with competitive power, performance, area, and yield (PPAY) in various applications. This paper describes smart scaling technologies for advanced FinFET node to make technology more competitive.
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