考虑带电物质的低热收支亚50纳米CMOS工艺建模的蒙特卡罗杂质扩散模拟

{"title":"考虑带电物质的低热收支亚50纳米CMOS工艺建模的蒙特卡罗杂质扩散模拟","authors":"M. Hane, T. Ikezawa, K. Takeuchi, G. Gilmer","doi":"10.1007/978-3-7091-6244-6_3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":13825,"journal":{"name":"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)","volume":"84 1","pages":"38.4.1-38.4.4"},"PeriodicalIF":0.0000,"publicationDate":"2001-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Monte Carlo impurity diffusion simulation considering charged species for low thermal budget sub-50 nm CMOS process modeling\",\"authors\":\"M. Hane, T. Ikezawa, K. Takeuchi, G. Gilmer\",\"doi\":\"10.1007/978-3-7091-6244-6_3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":13825,\"journal\":{\"name\":\"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)\",\"volume\":\"84 1\",\"pages\":\"38.4.1-38.4.4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-12-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/978-3-7091-6244-6_3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-7091-6244-6_3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}