甲基自由基在钨表面的化学反应

A. Gorodetsky, R. Zalavutdinov, S. P. Vnukov, V. Bukhovets, A. Zakharov, I. Mazul, A. Makhankov
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引用次数: 5

摘要

本文模拟了国际热核实验堆内圆顶表面与含烃自由基气体混合物的相互作用。为了研究甲基自由基在C x H y -H2-H (x=1−3,y=1−6)流动中的迁移和沉积过程,采用了流技术。在石英管入口的甲烷中产生的射频感应放电是甲基和氢原子的来源。甲基自由基通过气体流动穿过圆柱形钨嵌套,沉积在管壁、硅样品和钨样品上,形成聚合物样氢化非晶碳膜。结果表明,当钨片温度升高到420 K时,积碳速率明显降低。而在气相中,在低于340 K的温度下,二次烃在钨表面聚集和凝聚。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Methyl radical chemical reactions on a tungsten surface
In this paper an interaction of the inner dome surfaces of the International Thermonuclear Experimental Reactor with a gas mixture containing hydrocarbon radicals has been modelled. To study the processes of transport and deposition of methyl radicals in a C x H y –H2–H (x=1−3, y=1−6) flow, a stream technique has been used. A radiofrequency inductive discharge initiated in methane at the inlet of a quartz tube was a source of methyl and hydrogen atoms. Methyl radicals were transported by a gas flow that passed through cylindrical tungsten inserts and were deposited on the tube wall, on silicon samples and on tungsten samples, forming polymer-like hydrogenated amorphous carbon films. It has been shown that at the tungsten insert temperature increases to 420 K, and carbon deposition rate decreased significantly. However, in the gaseous phase the secondary hydrocarbon species accumulated and condensed on the tungsten surface at a temperature lower than 340 K.
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Plasma Devices and Operations
Plasma Devices and Operations 物理-核科学技术
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